Probe Systems
use programmable motorized staging to position contacting pin s.
See Also: Probe Stations, Flying Probes
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Probe Systems
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We offer a complete line of premium performance analytical probe stations for precise device test and measurement directly on wafer.
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MPI Fully Automatic Probe Systems
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MPI Advanced Semiconductor Test
Addressing the RF and High Power communication devices and discrete passive components production test market requirements, MPI introduced the TS2500 200 mm fully automatic probe system series. The system is based on industry leading production equipment from the Photonics Automation Division and incorporates decades of experience in RF and High Power measurement techniques from the MPI’s Advanced Semiconductor Test (AST) Division in combination with other AST products such as RF Probes, related calibration technology, and High Power accessories.
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MPI SiPH Probe Systems
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MPI Advanced Semiconductor Test
MPI designed dedicated SiPH upgrades for its well known 200 and 300 mm probe systems, which includes:*Various options of high-precision fiber alignment systems for ultra-fast scanning routines*Multiple measurement capabilities for O-O, O-E, E-O and E-E device configuration*Integrated Z-sensing for detecting the fiber to wafer contact point*Crash protection when using two optical fiber arms*Wide temperature range from -50°C to 200°C*Optional dark box for testing in light tight environment*Extensive software package for supporting easy integration to operator’s test executive*Probe system compatibility: TS2000-IFE, TS2000-SE, TS3000, TS3000-SE, TS3500 and TS3500-SE
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Probe Systems
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These flexible probe stations are designed for the ever-changing test configurations required in a engineering lab. Combined with durable probes or your own high-speed probes, PacketMicro probe stations are the most cost-effective probing solutions in the industry.
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Software
DIGITIZER
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The Digitizer allows the recovery of design data of unknown assemblies by an electrical analysis with a Condor flying probe test system
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Device Characterization
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Probe systems for device characterization must be particularly flexible because many different measurements often must be performed; DC, IV/CV, Capacitance, HF, 1/f, temperature and more. The modular architecture of the PS4L product line is ideal for these broad requirements.
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Kelvin Probe Systems
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Kelvin probe measures the work function difference between the tip and the sample when in thermoequilibrium state (a), and measures the electrical potential when the sample is illuminated (b), which is the sum of the difference in workfunction and internal/external-applied voltages.
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Magnetic Probing Systems
MPS-C-300 and MPS-C-350
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MicroXact’s truly unique patent-pending design enables wafer-level testing of spintronic devices, nanoscale electronics and many other materials and devices where magnetic fields are required for accurate test and measurement.
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Revolution CMMs
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Advanced Industrial Measurement Systems
A coordinate measuring machine (CMM) measures the geometry of certain physical objects along their X, Y, and Z axes. The CMM’s probing system scans objects at precise points to determine dimensions, angularity, size, profile, and angularity. These capabilities have many applications across different industries. In this blog post, we’ll explain the benefits of CMM technology and the types of machines we offer.
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CMM Retrofits
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Eventually, measurement software, probe systems and controller electronics become outdated by newer, faster, better systems. Our range of standard retrofits and upgrade kits will inject new life into your measuring machine.
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VX4 System
PrecisionWoRx
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The PrecisionWoRx VX4 System gives test facilities and probe card manufacturers the ability to confidently test tighter pitches and smaller probe tips. The system can be easily configured to specific requirements for a variety of probe card technologies. For processes using cards with very small probe tips, the system’s high-resolution optics deliver a detailed field-of-view for high accuracy and repeatability.
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Probe Card Analyzers
PB1500
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The PB1500 is a low cost probe card analyzer system. It has the capability to perform all the tests done on the larger PB3600/6500 probe card analyzers, but at a lower cost for low pincount cards. A maximum of 1,280 channels may be configured in the PB1500 MUX system. The Precision Measurement Unit (PMU) has the same accuracy, repeatability and range as the larger analyzers. The repair process consists of selecting a failing probe, which moves it under the binocular microscope and positions a crosshair over the correct position for that probe.
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MPI Manual Probe Systems
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MPI Advanced Semiconductor Test
manual probe systems are open, easy to use and cost effective yet highly accurate. These systems are designed for precision analysis of substrates and wafers up to 150, 200 and 300mm.
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Vacuum Probing Systems
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Built using our PS4L patented technology, SemiProbe manufactures a family of Vacuum Probing Systems, which test wafers or substrates in a vacuum environment. Additionally, individual die and broken/partial wafers can be tested with the Vacuum Probing System. All key modules are interchangeable and upgradeable.
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PORTABLE COORDINATE MEASURING MACHINE
CMM
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The HandyPROBE arm-free probing system generates high-accuracy measurements (accuracy of up to 22 µm), and outperforms traditional portable CMMs on the shop floor. The HandyPROBE portable CMM is currently used on the production lines of major players from the automotive, aerospace and manufacturing industries.
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Sampling Scope Adapter
N5477A
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The N5477A sampling scope adapter makes the InfiniiMax III probing system fully compatible with the Infiniium 86100 DCA sampling scope family. With the N5477A, the DCA modules have 30 GHz of probing, increasing their performance and flexibility.
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Capacitance Sensor Systems
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MTI Instruments offers high resolution capacitance sensors, probes and systems that generate low noise, highly accurate and high stable measurements. Our Capacitance sensor line-up offers accurate measurements for automated inspection applications such as thread quality inspection, disk drive run-out, leveling or flatness measurement, lens alignment, tire run-out and bulging. Our Accumeasure capacitive sensors offer large stand-off distance that includes single and multiple channel rack systems that connect up to 10 capacitive sensors or capacitance probes with individual analog measurement outputs. We also offer cost-effective customized capacitive sensor amplifier board and probe system for easy integration. Our inspection systems linearity exceeds 0.01% full scale measurement (FSM) and resolution to sub nanometers.
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Probe System for Life
PS4L
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The Probe System for Life, or PS4L, is SemiProbe’s patented adaptive probe system architecture. Unlike traditional probe systems, all of the basics components of our systems, including the bases, stages, chucks, microscope mounts, and manipulators, are interchangeable, upgrade-able, and configurable. The PS4L Adaptive Architecture ensures and optimal test configuration for each individual customer application.
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Single-Point Kelvin Probe
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Our Single-Point Kelvin Probe system (KP020) is the introductory system in the KP Technology product family. The off-null signal detection method allows high-quality measurements of the Work Function/Fermi Level of materials.
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Fully Manual Systems
SPS-1000, SPS-2000, and SPS-2200
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The SPS-1000, SPS-2000, and SPS-2200 systems are MicroXact’s premier manual probe stations designed to be flexible and easy to use. The high level of performance and affordability of these manual probe systems put them in a class of their own.
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Semi-auto 4 Point Probe System for Solar Cell Substrate
RG-100PV
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*Measurement system for thin film on substrate samples for multi-points measurement*Even pitch and random pitch for Max.1,000 points*2-D/3-D square mapping software for even pitch
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Ultra-High Vacuum Ф4 Scanning Kelvin Probe
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The Ф4 Ultra-high Vacuum Scanning Kelvin Probe system gives the user full access to work function measurements under vacuum with the ability to alter the temperature from 77 K to 860 K. The Kelvin Probe measurement has resolution of 1 - 3 meV for a 2 mm tip on a conducting sample. The sample is mounted on a plate that is located on a motorized (x, y, z) translator attached to a stainless-steel vacuum chamber. Phi 4 also comes with a photoemission spectroscopy system with a tuneable source (3.4 - 7.0 eV). The deep ultra-violet (DUV) light spot measures approximately 3 x 4 mm. Absolute work function measurements can be obtained with this system in the range of 4.0 - 6.5 eV with an accuracy of 0.05 - 0.1 eV.
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Semi-Automated Probe Stations
SPS 2600, SPS 2800, and SPS 12000 Series
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The SPS 2600, SPS 2800, and SPS 12000 Series systems are MicroXact’s semi-automated probe stations designed to be flexible and easy to use when performing high productivity device characterization, wafer level reliability testing and failure analysis. These semi-automatic probe station systems are designed to support manual and semi-automatic probing of up to 200mm wafers.
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Environmental (Radiation) Monitoring System
Hawk® EMS
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The Hawk® EMS is a wall or tripod-mounted radiation monitoring and alarm system designed for use with the Hawk® Radius dual sensor radiation probe. Each EMS System comes with a Hawk Radius Probe. The system is extremely energy efficient and can run for weeks on an internal 9 volt back-up battery if power fails. It is well suited for operating on a small solar panel, which is an optional accessory. The Hawk® EMS features two displays that show the radiation levels measured by each of the probe’s two detectors: the weatherized “pancake-style” Geiger-Mueller tube — which measures alpha (if configured for it), beta, low energy gamma, and x-radiation — and the energy-compensated gamma tube which measures penetrating gamma dose rate. The probe can be mounted next to the EMS system or outdoors, or in adjacent rooms on cables up to 100 ft in length. Standard cable is 3 meters in length. Optional signal booster can support cable lengths longer than 100 feet. Optionally the system can also be configured to share data on ethernet or wireless networks.
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Bridge Coordinate Measuring Machines
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Measurement results with high accuracy are particularly important for quality assurance. Bridge coordinate measuring machines from ZEISS have a precise probe system that convinces with high measuring speed. The various solutions and systems can be tailored directly to individual requirements.
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Failure Analysis
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Failure Analysis (FA) plays a crucial role in the production of semiconductors. It provides process and design feedback to determine the root cause of any failures. Time-to-data for the FA Engineer is a critical measurement and SemiProbe’s Probe System for Life ® (PS4L) is ideally suited to excel in this application. All key components are interchangeable, making it easy to switch between individual die, wafers, and packaged parts.
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Cryogenic Probe Station
CRX-4K
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Designed for versatility and high performance, the CRX-4K is our premium cryogen-free closed-cycle refrigerant probe station. This system is the solution for those looking for the convenience of cryogen-free operation and the exceptional measurement performance of a Lake Shore product.
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Active Probe
TETRIS®
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PMK Mess- und Kommunikationstechnik GmbH
MK presents a unique inline probing system – the TETRIS® Active Probe which can contact adjacent square pins in 2.54 mm pitch simultaneously. 1 MΩ / 0.9 pF
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Software Module for Analyzing Measured Data to any CAD Model
Verisurf Analysis
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Simplifies part inspection through the comparison of measured points, clouds, and meshes, to all CAD file formats. Check part characteristics such as position and profile quickly and easily using a variety of alignment, analysis, and reporting techniques.Analyze to CAD with imported data sets or directly from measured points, clouds, or meshes from 3D measuring devices including portable probing and scanning systems and both manual and CNC CMMs to analyze part tolerance compliance.
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Manual Flying Probe Test Systems
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They provide flexible measurement technologies like Kelvin and high voltage tests in combination with low tooling costs. atg Luther & Maelzer offers a wide range of different systems starting from standard systems with 8 heads up to oversized systems with 24 test heads.





























