Probe Stations
system to contact DUTs to drive and receive signals.
See Also: Probe Systems, Flying Probes, Manual Probe Stations, Cryogenic Probe Systems
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Product
Semi-Automated Probe Stations
SPS 2600, SPS 2800, and SPS 12000 Series
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The SPS 2600, SPS 2800, and SPS 12000 Series systems are MicroXact’s semi-automated probe stations designed to be flexible and easy to use when performing high productivity device characterization, wafer level reliability testing and failure analysis. These semi-automatic probe station systems are designed to support manual and semi-automatic probing of up to 200mm wafers.
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Product
Cryogenic Probe Station
CryoPro
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Materials Development Corporation
The MDC Model 441 Cryogenic Probe Station is a cost effective alternative to high-priced vacuum based cryogenic probe stations. With up to five probes available and sample diameters up to six inches, the MDC Cryogenic Probe Station allows for electrical measurements at temperatures near liquid nitrogen levels (77K).
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Product
Cryogenic Probe Station
FWPX
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Lake Shore’s FWPX probe station is designed for researchers who require large-size wafer probing. The FWPX accommodates wafers up to 102 mm (4 in) in diameter and can be modified to accept up to 152 mm (6 in) wafers. This general-purpose probe station is designed for researchers or engineers conducting material characterization tests over large samples. It is also an effective unit for measuring organic materials.
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Product
Powerful, Fully Integrated Workstationfor Emission Microscopy
PEM-1000
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The PEM-1000 emission microscope incorporates the latest technology in real time, high quantum efficiency, mega-pixel CCD detectors in a back-thinned cooled camera. A portable system, the PEM 1000 can interface with all analytical probe stations, ATE (automated test equipment) and bench top configurations for high speed functional testing.
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Product
Fully Manual Systems
SPS-1000, SPS-2000, and SPS-2200
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The SPS-1000, SPS-2000, and SPS-2200 systems are MicroXact’s premier manual probe stations designed to be flexible and easy to use. The high level of performance and affordability of these manual probe systems put them in a class of their own.
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Product
Cryogenic Probe Station
EMPX-HF
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The Lake Shore EMPX-H2 probe station enhances standard probe station capabilities with the addition of a ±0.6 T horizontal field electromagnet. All standard C-V, I-V, microwave, and electro-optical probing, plus in-plane horizontal field electromagnetic measurements can be performed on this versatile station. Researchers can use it for testing magneto-transport parameters. The EMPX‑H2 is Lake Shore’s premier probe station for vector-dependent magneto-transport measurements.
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Product
Analytical Probe Station with Laser Cutting System
LCS- 4000 Series
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The LCS-4000 Probe Station with Integrated Laser Cutting System gives the user maximum flexibility in semiconductor diagnostic cutting, failure analysis, trimming, marking and topside layer removal. All of these functions can be performed on a microscopic level, all on this one system which provides a high level of performance that is remarkably easy to use.
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Product
MmW Probe Station
EB-6V
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The EB-6V probe station is designed for all frequency extenders such as those from VDI, OML, R&S, Keysight, Anritsu. If you are using an Anritsu VNA VectorStar ME7838A4 model, or commonly Anritsu 3743A mmW Extenders and related sizes, the station of interest is the EB-6A.
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Product
Probe Systems
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We offer a complete line of premium performance analytical probe stations for precise device test and measurement directly on wafer.
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Product
Mini Probe Station
C-2
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The smallest probe station which still preserves the key functions and precision that are fundamental to all probing. This size is still capable of DC and RF measurements, making it the most versatile in its size.
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Product
High Power Devices
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SemiProbe configures our PS4L Adaptive Architecture into the Voltarus (TM) family of probe stations to fulfill the unique requirements of testing high power devices at wafer level prior to packaging. Voltarus probe stations are available in manual, semiautomatic, and fully automatic configurations that can test and characterize power devices up to 10 KV or 200 Amps (pulsed).
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Product
Cryogenic Probe Station
CRX-4K
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Designed for versatility and high performance, the CRX-4K is our premium cryogen-free closed-cycle refrigerant probe station. This system is the solution for those looking for the convenience of cryogen-free operation and the exceptional measurement performance of a Lake Shore product.
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Electrical Probe Systems
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INSTEC's Probe Systems offer an integrated solution for performing component-level electrical measurements over a wide temperature range.Compact Mini Probe Stages enable an existing inspection microscope or optical test setup to be converted easily into a precision temperature-controlled semiconductor testing and qualification station.Analytical probe stations are fully featured industry-standard platforms for all modern probing applications and testing.Benchtop Probe Stations provide the user with four independent electrical probes with X,Y,Z micropositioning for precise placement without opening the sample chamber.Highly configurable probe systems meet a range of requirements for atmospheric and temperature control, sample areas, and electrical measurements.
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Product
Automated DC Parametric Curve Tracer
MegaTrace
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MegaTrace supports pin counts greater than 625 up to 2160 pins, with 1080 pins being popular. Comprised of a cart that contains the test chassis, PC monitor, drive bus box, and a test interface, MegaTrace is easy to move around and use with other instruments like emission microscopes, probe stations, and other remote testing requirements.
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Product
Probe Station
EPS1000
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Reasonable price and compact design. - Sellectable chuck size : 4inch, 6inch, 8inch when ordering probe station. - Hot chuck can be installed. Temp range: RT ~ 300°C - Hot and cool chuck from 0 °C ~ 300 °C can be provided. - Maximum pcs of manipulators can be installed on the base unit of probe
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Product
Cryogenic Probe Station
CPX-VF
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The Lake Shore CPX-VF probe station enhances the standard probe station capabilities with the addition of a ±2.5 T vertical field superconducting magnet. It can do all the standard C-V, I-V, microwave, and electro-optical probing of the CPX, plus out-of-plane vertical field superconducting magnetic measurements. Researchers can use it to perform Hall effect measurements and test magneto-transport parameters. The CPX-VF is one of Lake Shore’s premium probe stations for combining microwave measurements with magnetic field.
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Product
Enhanced Probe Station
EB Series
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Comprehensive prober for DC and RF. The EB series contains features to step-up your usability to acquire the accurate data you need from your devices. It has a built in probe card slot.
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Product
CC-TLP Probe
CC-TLP-50-A1
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High Power Pulse Instruments GmbH
*Capacitively coupled TLP probearm (CC-TLP) compatible with standard probing stations*18 GHz SMA connector*Tilt angle adjustment*Calibration gauge for needle height
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Product
Probe Cards
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PICOPROBE® PROBE CARDS by GGB Industries, Inc., allows for more chip design flexibility because each probe card is custom configured to your circuit for testing wafers on either manual or automatic probe stations. Probe cards with complex layouts consisting of numerous DC contacts and multiple microwave probes with operating frequencies of 40, 50, 67, or 110 GHz can be custom fabricated quickly and inexpensively.
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Product
Electro Optical Terahertz Pulse Reflectometry
EOTPR 3000
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The EOTPR 3000 system is configured with a manual probe station to meet today’s tough FA environment which requires to isolate fault location in minutes rather than hours or days, while maintaining the EOTPR’s world leading sub-5 μm fault isolation accuracy.
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Product
Controlled Environment Probe Station
CG-196
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Everbeing controlled environment probe station allows vacuum and cryogenic probing down to 77K with liquid nitrogen or high temperature probing up to 1273K. Efficient in characterizing your devices at extreme temperatures, vacuum, specific gas, etc.
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Cryogenic Probe Station
TTPX
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The TTPX probe station is an affordable, entry-level probe station capable of making a wide variety of non-destructive, standard electrical device measurements. The compact tabletop design is perfect for academic and laboratory research settings. The TTPX provides efficient cryogenic temperature operation and control with a continuous refrigeration system using either liquid helium or liquid nitrogen.
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Product
Vector Network Analyzer Extenders
VNAX
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VDI''s VNA Extenders deliver high performance network analyzer frequency extension into the THz range. Models cover 50 GHz to 1,100GHz with additional bands in development. VDI modules come in a variety of form factors and configurations including our original Standard-size Modules and new Mini Modules that reduce volume up to 75%. In addition to our full Transceiver (TxRx) modules, VDI also offers Transmit-Reference (TxRef) modules and Receive only (Rx) modules that deliver optimized performance for specific applications. These modules combine high test port power and exceptional dynamic range to deliver industry leading performance. They are compatible with most network analyzers and can be integrated into probe stations and antenna chambers.
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Product
Portable Manual Probing Station
Model W4.0 x L6.5
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This portable manual probing station is designed for a versatile, comfortable, and accurate operation on up to 4.0” wafers or 4.0” X 6.5” printed circuit board assemblies. This turn-key, manually operated probing station, model W4.0 x L6.5, is part of the D-COAX commitment to the test and measurement and PCB fabrication industries.
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Product
Starter Probe Station
C Series
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Contains fundamental features to probing. C series lets you kick off your experiments and is an entry level machine designed for ease of use while allowing you to get accurate, reliable results.
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Product
Probing Solutions
ES62X-CMPS
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The ES62X-CMPS compact manual probe station is a rugged wafer probing solution designed for high reliability, compact size and low investment cost. It enables manual wafer level measurements up to 300 mm wafers. The probing station can also be used for TLP, HMM, HBM, LV-Surge, RF, S-parameter and DC-measurements. Micro positioners with vacuum as well as magnetic base can be attached. The chuck has a vacuum interface for the wafer and is electrically isolated. Multiple 4 mm connectors can be used to connect a voltage potential to the wafer backside.
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Product
Probe Card
T90™ Series
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The 90 mm tile was designed for mounting on a standard 4.5″ probe card holder for multi-site wafer level reliability testing. The 1.6 mm (0.062″) thick rails allow the chassis to slip into planarity adjustable probe card holders for most analytical probe stations.
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Product
Semi-Automatic LCD Probe Station/Laser Repair System
LCD 2424
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The Model 2424 Semi-Automatic LCD Probe Station is designed especially for probing LCDs and other large substrates. Built on a steady and reliable anti-vibration table, the Model 2424 has powerfully built features that perform a number of specific tests required by all LCD/flat panel display manufacturers.
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Product
Probe Station
DARK BOX
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Size : 750 × 660 × 660 mm - Material : Steel - We can provide various dark box in size and shape at reasonable price as per customer requirements.And we also provide “integral sphere” with probe station as below.
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Product
Semi-Automatic Probe Station
P300A
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The P300A probe station is the most stable, intuitive, and space efficient 300mm semi-automatic analytical probe station available today. Designed for low current, sub-micron positioning applications, the P300A comes standard with features such as single-point ground, dry/dark environment, and integrated thermal chuck plumbing.





























