VPG⁺ 200/400/800 Volume Pattern Generators
VPG⁺ 200 / VPG⁺ 400 / VPG⁺ 800 - Heidelberg Instruments
The VPG⁺ 200, VPG⁺ 400, and VPG⁺ 800 Volume Pattern Generators are advanced lithography systems that cater to meticulous mask manufacturing for i-line resists. Specifically engineered for high-resolution electronic packaging and other demanding applications, these versatile systems adeptly manage substrate sizes ranging from 9" x 9" to an impressive 32" x 32". Each model integrates a cutting-edge high-speed exposure engine, significantly lowering write times while boosting productivity in environments requiring continuous operation. This exceptional functionality allows for the creation of packaging masks, achieving results that meet the stringent line-width uniformity and edge roughness standards demanded in the industry.
