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Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Coordinate Measuring Machines
The LK Metrology range of Coordinate Measuring Machines represent the ultimate in CMM technology. Designed and manufactured using only the highest quality materials, they carry a heritage of over 55 years experience and expertise. LK CMMs deliver the ability to perform dimensional, positional and surface measurement in a single system.
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Metrology Systems
VIEW offers a full line of optical metrology systems for wafer, photomask, slider, MEMS, semiconductor package, HDD suspension, probe card, and micro-component process measurements.
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Scatterometers / Thin film Metrology Systems
Olympian Series
DUV-Vis-IR (Wavelength Range: 190nm – 15,000nm) Scatterometers / Thin Film Metrology Systems: The n&k Olympian, n&k Olympian-450 and n&k Olympian-M are DUV-Vis-IR scatterometers/thin film metrology systems with micro-spot technology, covering the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s DUV-Vis-NIR scatterometer series – the OptiPrime-CD Series.
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E-beam Metrology And Inspection
Our HMI e-beam solutions help to locate and analyze individual chip defects amid millions of printed patterns.
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Non Contact Measurement
There is no one-size-fits-all solution for accurate measurement, and different applications require different measurement systems. At Vision Engineering, we design and manufacture a broad range of non-contact measurement systems from toolmakers’ measuring microscopes to fully automated CNC video measuring systems with optional contact measurement available. Combined with the latest metrology software solutions available, we offer the right tool for the job.
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Precision Shunts
Ohm-Labs manufactures metrology grade shunts for precise measurement of current from <1 mA to 3000 A.
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High Precision Angular Positioning, Calibration and Geometry Inspection
LabStandard DUO
Rotary Precision Instruments UK Ltd
Ultra precise rotary tables intended for fine inspection, metrology and test applications.2 axis design for rotary tilting applications with self-locking worm gearing and a high accuracy angular encoder ensures sensitivity and fine positioning for metrology and precision testing.
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Deep Ultraviolet Spectrophotometer System
VUVAS-10X
A new ultraviolet spectrophotometer system for optical metrology just arrived at NASA Goddard! The VUVAS-10X spectrophotometer works best in the 90 to 160 nanometer wavelength range, also known as deep or vacuum ultraviolet (VUV) region. It uses a windowless hydrogen plasma light source and differential pump section to reach many wavelengths beyond those of conventional deuterium lamps. The source also works with other gases, or gas mixtures, for atomic spectral line emission from about 30 nanometers (double ionized Helium gas) up to the Visible light range. The new spectrophotometer system, McPherson VUVAS-10X, uses a one-meter focal length high-resolution monochromator with the special light source, scintillated detector and Model 121 goniometric sample chamber. The system is ideal for optical transmission, absorbance and specular reflectance at incident angles up to 60 degrees. This McPherson spectrophotometer system will help develop, inspect and qualify optical materials and coatings used for very high altitude and extraterrestrial space flight missions.
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Pulser Sensor, Sent Signal, CNEX/ATEX Certificates
SK-S
Beijing SANKI Petroleum Technology Co., Ltd.
*convert the mechanical transmission signal of flow meter into electrical pulse signal* send the electrical pulse signal to main-board to realize the metrology function of the flow meter
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Adapters and Connectors
A broad range of adapters and connectors designed for long life, exceptional repeatability, and legendary reliability. Metrology grade, instrument grade, and general purpose grade adapters are available in frequencies up to 110GHz.
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High Performance Polyphase Energy Metering AFE w/ Power Quality Analysis
ADE9000
The ADE9000 is a highly accurate, fully integrated energy-metering device. Interfacing with both current transformer (CT) and Rogowski coil sensors, the ADE9000 enables users to develop a three-phase metrology platform, which achieves high performance for Class 1 through Class 0.2 meters. Power quality features enable advanced meter designs with fast rms measurements and power quality level monitoring for EN50160 compliance. The ADE9000 integrates seven high performances ADC’s, a flexible DSP core. An integrated high-end reference ensures low drift over temperature with a combined drift of less than ±25 ppm/°C max for the whole channel including PGA and ADC.
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QE Systems
Abet Technologies offers a range of standard EQE and IQE measurement systems. Model QE-1100 is configured with the most useful components for single junction devices. It has a 350 – 1100 nm range. The QE-1800 is configured with components most useful for components for triple junction cells. Beyond the standard systems offered systems can be custom configured to meet a customer’s metrology needs.
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Sphygmomanometer Calibrator
Huaxin Instrument (Beijing) Co., Ltd
Here at Huaxin, as an expert test equipment solution provider, we are proud to offer a selection of pressure calibrators for precise calibration of sphygmomanometer in laboratory and on site. Our sphygmomanometer calibrators find wide applications in metrology bodies, hospitals, university labs, etc.
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Metrology Software
ZYGO has been developing metrology software for decades – our commitment to helping our customers measure confidently, and the heart of our quality guarantee. Our original instrument software, MetroPro, established itself as a gold standard in the optical metrology world. Now, its successor Mx continues that legacy: trusted, easy to use, and heavily customizable.
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Smart Factory Inspection System
API, recognizing manufacturing industry’s increasing demand for part measurement automation, with a higher degree of accuracy, has developed its Smart Factory Inspection System with true 6 Degrees of Freedom (6DoF) real-time 3D robotic measurement incorporating its proven metrology technology and calibration components.SFIS can be delivered as a customized integrated solution or as a standard production inspection cell.
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CMM Upgrades
Upgrade your existing CMM, experience the power of Verisurf on all of your measuring devices, and eliminate the inconvenience of maintaining different metrology software (and skill sets) for different systems.
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Metrology Device
XPLOR 100
XPLOR 100 is a state of the art, fully automated metrology device designed for measurement and analysis of bubbles and inclusions for optical substrates in the Visible and NIR wave-bands.
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Primary Standard Capacitors
GenRad 1404 Series
The GenRad 1404 Series standard capacitors are the standard of choice in metrology labs, and still used today by standards bodies around the world. These capacitors have been designed as primary reference standards of capacitance with which working standards can be compared.
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Slip Line Detection System
YIS 200
The YIS and SF Series metrology systems are designed for optical detection of wafer defects such as crystaldislocations, slip and other defects. The YIS-300HM (for 300 mm wafers) and YIS-200HM (for 200 mm wafers) utilizeMakyoh optics technology (Magic Mirror) and integrated robotic wafer handler provided by Hologenix.
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Metrology Solutions for Semiconductors
Bruker Semiconductor develops, manufactures, markets, and supports metrology solutions for thin films, which are based on novel, rapid, non-contacting and non-destructive X-ray technology. With Bruker’s acquisition of Jordan Valley Semiconductors, a name synonymous with unparalleled worldwide customer service and support, 75% of the world's top 25 semiconductor manufacturers rely on Bruker metrology tools for front-end and back-end applications, including development of their next-generation thin films. Bruker commitment to innovation and technology leadership drives the continued release of new advancements in metrology, and has garnered numerous awards and industry recognition. In applications ranging from C-S thin films materials characterization to wafer substrate analysis and defect detection, Bruker’s systems provide simulation analysis and fit. HRXRD, XRR, WA-XRD, and XRDI measurement types are fully supported, enabling researchers, production engineers, and process developers unparalleled capabilities. Whether you are a semi and C-S fabricator, R&D center or academy, or an industry materials research facility, Bruker has a specifically designed solution for your metrology needs.
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Automatic Online Flatness and Surface Appearance System
UltraSort200
The UltraSort continues our 25 year tradition of providing metrology solutions to semiconductor wafer manufacturers. Designed for volume wafer production, this automated system offers superior performance in rapid, repeatable, accurate, noncontact qualification of silicon and alternative substrate wafers.
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kSA ACE
The kSA Atomic Control for Epitaxy (ACE) metrology tool is a highly sensitive instrument that measures the in situ flux rate of atomic species using the principle of atomic absorption spectroscopy.
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Smart Energy Solutions
To address the needs of the smart energy market, we offer a platform that incorporates application-specific solutions as well as standard microcontroller, microprocessor, security, memory, wireless and power-line connectivity devices. This smart energy portfolio offers you best-in-class feature sets and performance for designing equipment for the smart grid. The smart meter architecture requires different levels of integration depending on system architecture partitioning, project timelines and the level of flexibility needed to address the requirements of different geographies and utility companies. Our platform provides a unique multi-level architecture built around a multi-core solution as illustrated below. A variety of devices can be used as building blocks for your smart meter design. These include metrology sensing (analog-to-digital conversion); metrology digital signal processing; application, communication and security processing as well as connectivity to area networks in homes neighborhoods.
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Reference Meter
SB1300
Shenzhen Star Instrument Co., Ltd.
The SB1300 three-phase multi-function reference meter incorporates 32-bit floating point DSP, wide-range measuring and embedding industrial PC technologies. This model was the first approved by China National Institute of Metrology. Star Instrument has been granted the first manufacturing license for class 0.02 reference meters. Basic measuring range (phase voltage): 1V~480V, current measuring range: 1mA~120A; wide measuring range (phase voltage): 0.1V~1000V, current measuring range: 0.1mA~200A
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Packaging Manufacturing
KLA’s extensive portfolio of packaging solutions accelerates the manufacturing process for outsourced semiconductor assembly and test (OSAT) providers, device manufacturers and foundries for a wide range of packaging applications. Innovations in advanced packaging, such as 2.5D/3D IC integration using through silicon vias (TSVs), wafer-level chip scale packaging (WLCSP), fan-out wafer-level packaging (FOWLP) and heterogeneous integration as well as a wide range of IC substrates create new and evolving process requirements. KLA offers systems for packaging inspection, metrology, die sorting and data analytics focused on meeting quality standards and increasing yield before and after singulation. SPTS provides a broad range of etch and deposition process solutions for advanced packaging applications. Orbotech offers a portfolio of technologies that includes automated optical inspection (AOI), automated optical shaping (AOS), direct imaging (DI), UV laser drilling, inkjet/additive printing and software solutions to ensure manufacture of the highest quality of IC substrates.
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Inductance Standard
1482 Series
The GenRad 1482 Standard Inductors are the standard of choice in metrology labs. Used today by national metrology institutes and primary standards bodies around the world, these inductors have no peer or equivlent.
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Programming
You are looking for a LabVIEW-solution for a test problem? LabVIEW is an excellent development environment for all areas of metrology. Here we have extensive experience and can help in your test problems. In the LabVIEW programming language, we develop VIs (Virtual Instruments) that can be integrated easily in TestStand. Using hardware-oriented programming languages such as C# and LabVIEW, we develop integrations of control and measurement components.
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Photovoltaic/Solar Metrology System
Multi-channel thickness, TTV and bow measurement module for in-process monitoring of solar/photovoltaic wafers and other materials.
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Process XRR, XRF, and XRD metrology FAB tool
MFM310
Thickness, density, roughness & composition of films on blanket and patterned wafers. The Rigaku MFM310 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks.
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