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Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Software
Metrology systems vary significantly in their utility, which is largely a function of software. The software ultimately determines what the system can do, and if certain capabilities, commands, or calculations are absent, it can severely compromise productivity.
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Stocker, Sorter and Metrology System
CODEX™
Genmark Automation’s CODEX™ Stocker is the industry’s first integrated stocker, sorter and metrology system that has the ability to store, track, and deliver, on demand, multiple substrate types along with their key attributes. Consolidating the functions of these traditionally nonrevenue-generating tools frees up fab floor space for production equipment, enabling a facility to maximize its productivity and yield.
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Slip Line Detection System
YIS 200
The YIS and SF Series metrology systems are designed for optical detection of wafer defects such as crystaldislocations, slip and other defects. The YIS-300HM (for 300 mm wafers) and YIS-200HM (for 200 mm wafers) utilizeMakyoh optics technology (Magic Mirror) and integrated robotic wafer handler provided by Hologenix.
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SlipFinder
YIS and SF Series
The YIS and SF Series metrology systems are designed for optical detection of wafer defects such as crystaldislocations, slip and other defects. The YIS-300HM (for 300 mm wafers) and YIS-200HM (for 200 mm wafers) utilizeMakyoh optics technology (Magic Mirror) and integrated robotic wafer handler provided by Hologenix.The SF300M and SF300N systems offer a low cost functionally equivalent alternative to the YIS series.
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Photovoltaic/Solar Metrology System
Multi-channel thickness, TTV and bow measurement module for in-process monitoring of solar/photovoltaic wafers and other materials.
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INnLline Metrology Automated & Robotized Solutions
Automation projects
Bring automation to an existing manual inspection process. Integrate 3D measurements on the shop floor for better traceability. Increase part inspection throughput and reduce cycle times and costs.
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Biconical Antennas
TDK Biconical Antennas - precision biconical antenna, metrology biconical antenna, high power biconical antenna.
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Metrology System
Echo
The Echo system is a comprehensive in-line metal film metrology tool for single and multi-layer metal film measurements in leading-edge logic, memory, advanced packaging, and specialty semiconductor devices.
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Metrology System
IVS
The IVS 220 system is the latest generation in the IVS series and has been designed for ultimate precision, TIS (tool induced shift) and throughput on 200mm wafers. The cornerstone of the system’s reliability and stability is its mean time between failure (MTBF) of 2,100 hours. The IVS 280 provides the same capability in a package designed for overhead track handling with full E84 GEM300 capability.
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Thermistor Power Meter
N432A
Keysight N432A is the replacement for Keysight's legacy 432A analog thermistor power meter. The single-channel, average RF power meter operates with the Keysight 8478B and 478A thermistor mounts. The N432A-and-thermistor-mount pair is ideal for applications that require high measurement accuracy, particularly in metrology and calibration laboratory environments. The enhanced thermistor power meter comes with a digital color LCD display, and user-friendly front panel interface. Its built-in calibration factor table provides a more convenient and accurate method of storing calibration factors as compared to the old knob-turning approach of the 432A. The N432A is LXI compliant, and programmable via GPIB, USB and LAN.
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Reticle Manufacturing
An error-free reticle (also known as a photomask or mask) represents a critical element in achieving high semiconductor device yields, since reticle defects or pattern placement errors can be replicated in many die on production wafers. Reticles are built upon blanks: substrates of quartz deposited with absorber films. KLA’s portfolio of reticle inspection, metrology and data analytics systems help blank, reticle and IC manufacturers identify reticle defects and pattern placement errors, thereby reducing yield risk.
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Rotational Metrology System
The ZeroTouch® Rotational Metrology System is a precise, high-speed, in-line or near-line metrology, and inspection system that measures critical dimensions of rotors, stators, brake discs, and other cylindrical parts, providing manufacturers with real-time metrology, and inspection data to optimize production processes, detect defects, and improve ROI.
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330 System
NSX
With a combination of inspection plus metrology, NSX 330 System measures multiple applications including wafer-level metrology for micro bumps, RDL, kerf, overlay, and through silicon via (TSV) in a single wafer load.
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Packaging Manufacturing
KLA’s extensive portfolio of packaging solutions accelerates the manufacturing process for outsourced semiconductor assembly and test (OSAT) providers, device manufacturers and foundries for a wide range of packaging applications. Innovations in advanced packaging, such as 2.5D/3D IC integration using through silicon vias (TSVs), wafer-level chip scale packaging (WLCSP), fan-out wafer-level packaging (FOWLP) and heterogeneous integration as well as a wide range of IC substrates create new and evolving process requirements. KLA offers systems for packaging inspection, metrology, die sorting and data analytics focused on meeting quality standards and increasing yield before and after singulation. SPTS provides a broad range of etch and deposition process solutions for advanced packaging applications. Orbotech offers a portfolio of technologies that includes automated optical inspection (AOI), automated optical shaping (AOS), direct imaging (DI), UV laser drilling, inkjet/additive printing and software solutions to ensure manufacture of the highest quality of IC substrates.
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Metrology Systems
VIEW offers a full line of optical metrology systems for wafer, photomask, slider, MEMS, semiconductor package, HDD suspension, probe card, and micro-component process measurements.
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SF6 Electrical Equipment Gas Comprehensive Detector
JH4000D-4
Xiamen Jiahua Electrical Technology Co.,Ltd
JH4000 series SF6 Electrical Equipment Gas Comprehensive Detector is a high precision, intelligent and portable comprehensive detector. It detects the main decomposition products, as well as SF6 purity and moisture content. It is reliable, accurate and stable. The user is able to make rapid and accurate judgment based on the content of main decomposition products, SF6 purity and moisture content. Inspected by authorities such as the National Institute of Metrology, the device, having excellent performance, complies with relevant international and national standards. It is a product recommended for use by the State Power Grid Company. This comprehensive detector is designed flexibly for the user’s choice. They can combine any two or three detection together. They can work simultaneously or separately, providing more complete measures for the inner fault diagnosis and it is an effective measure for preventive and corrective maintenance.
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Post Dicing
Camtek offers dedicated inspection and metrology solutions for dicing-related processes, ensuring the reliability of the end product. Camtek developed new capabilities to address new dicing technologies such as Stealth and Plasma dicing using new algorithmic and technologies such as Back Light illumination, as well as various handling solutions.
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Metrology System
IMPULSE V
With tighter wafer-to-wafer and within-wafer uniformity tolerances, integrated metrology systems are in use across various semiconductor processing steps. Based on demonstrated high-resolution optical technology, the IMPULSE V system provides higher sensitivity to thin film residue measurements during the CMP process. The IMPULSE platform boasts the industry’s most reliable hardware with best-in-class reliability and productivity metrics.
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Atomic Force Microscope
XE-PTR
Park Systems' PTR Series is a fully automatic industrial in-line AFM solution for, but not limited to, automatic Pole Tip Recession measurements on Rowbar-level, individual Slider-level, and HGA-level sliders. With sub-nano scale accuracy, repeatability, and throughput, the PTR Series is the metrology tool of choice for Slider manufacturers to improve their overall production yield.
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Optical Filter Sets
Our filter sets support a great range of fluorophores for microscopes and imaging systems. Patented design techniques drive some of the most spectrally sophisticated optical filters on the market. High transmission, steep edges, precise spectral edge placement, and optimized blocking combine for more reliable measurements. A wide selection of individual bandpass filters and dichroic beam-splitters support unique applications, and world-class manufacturing and cutting-edge metrology ensure consistent performance that always meets specifications.
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Hydrogen Frequency & Time Standard
CH1-1007
Hydrogen frequency and time standard Ch1-1007 is designed to generate and reproduce precision, highly stable, spectrally pure frequency and time signals. Main areas of application: – in metrology when transferring the sizes of units of frequency and time, including as part of mobile measuring complexes; – in radio astronomy when conducting scientific research; - in radio navigation when working as part of automated measuring systems and complexes.
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Fizeau Interferometers
Fizeau interferometers offer an unmatched combination of performance, quality and value in optical metrology. They produce accurate, repeatable interferometric measurements of surface shape, radius of curvature and transmitted wavefront quality.
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DUV-NIR Spectroscopic Reflectometry
FilmTek 2000
Scientific Computing International
Automated metrology system designed for rapid, reliable, and accurate characterization of nearly any unpatterned thin film. Fully user-customizable wafer mapping capabilities rapidly generate 2D and 3D data maps of any measured parameter. Capable of simultaneous determination of multiple film characteristics within a fraction of a second per site.
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Surface Analysis
Dimension AFP
The Dimension AFP is the world's only fab-based metrology tool specifically designed for both CMP profiling and etch depth metrology for current and advanced technology nodes. The system combines the superb resolution of an AFM with the long-scan capability of an atomic force profiler tomonitor etch depth and dishing and erosion on submicron features with unsurpassed repeatability.
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Micro-spot Spectroscopic Reflectometry
FilmTek 2000M
Scientific Computing International
Micro-spot size benchtop metrology system engineered for unparalleled versatility and high performance, meeting the needs of patterned film applications requiring a very small spot size. Allows for measurement spot sizes as small as 2µm, and delivers reliable measurement of both thin and thick films.
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Metrology
KLA’s metrology systems address a range of chip and substrate manufacturing applications, including verification of design manufacturability, new process characterization and high volume manufacturing process monitoring. By providing precise measurement of pattern dimensions, film thicknesses, layer-to-layer alignment, pattern placement, surface topography and electro-optical properties, our comprehensive set of metrology systems allows chip manufacturers to maintain tight control of their processes for improved device performance and yield.
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CMOS USB3 Cameras
CELERA One Series
CELERA One camera series provide the same excellence in quality, flexibility and performances of CELERA cameras, with the only exception of a single USB3 interface, while keeping the original extremely reduced dimensions and rugged design that make CELERA One cameras suitable for most applications: automated optical inspection, high performance sorting systems, industrial metrology, microscopy, medical diagnostics and machine vision.
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kSA RateRat Pro
kSA RateRat Pro is a compact, convenient and easy-to-use optical metrology tool for thin-film characterization. Its unique capability is to measure, in situ and in real-time, optical constants (n and k), deposition rate and film thickness.
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Dimensional Metrology
Fleet Connectivity & Control Family
Nova Measuring Instruments Inc.
Nova’s Fleet Management and Performance Monitoring Center simplify the management and enhance the productivity of Nova tools in the fab. The platform’s ability to process and analyze large amounts of fleet and metrology data using advanced data analytic tools provides our customers with intelligent and predictive insights on tool performance and process trends.
