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Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Scatterometers / Thin Film Metrology Systems
OptiPrime Series
The n&k OptiPrime series are automated metrology systems used to fully characterize and monitor Thin Film and OCD applications for both current and next generation IC processes.
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Slide Calipers
We recognize that reliable operation and dependable accuracy are essential to your quality and manufacturing operations. As part of our commitment to quality, we have established first generation NIST traceable documentation for all calibration artifacts and standards. Our metrology professionals are available to assist you with whatever you need to keep your system on the job.
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Calibration Baths
Fluke Calibration temperature baths provide optimal temperature environments for “secondary” or “comparison” temperature calibrations. They offer unsurpassed stability and uniformity, a large working volume, and flexibility for performing thermometer calibration on calibrating a variety of temperature sensors. A world-class temperature controller and 30+ years of experience make these the choice of National Metrology Institutes and calibration laboratories worldwide. Fluke Calibration temperature baths include: compact temperature baths; deep-well temperature baths; standard calibration baths; resistor maintenance baths; ice-point baths; bath / temperature controllers.
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Meter Test Equipment
Signals & Systems India Private Limited
Our meter test equipment is a user-friendly and innovative device for energy meter calibration, built on the current technologies – Bluetooth & Android. The metrology sub-unit measures and communicates the parameters to an Android Tab via Bluetooth. All user interfaces – textual, graphical, and data entry are made available on the Android application, with innovative features. Being a portable device measuring the voltages and currents from the metering panel, the product ensures the safety of the test personnel by making use of wireless communication between the equipment – which is connected to the High Voltage- and the user interface – Tab.
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Inspection Systems
EVG's metrology solutions for wafer inspection and measurement are optimized for lithography and all types of bonding applications. Customers can choose between integration of the metrology technology within fully-automated equipment, or stand-alone metrology systems serving multiple process steps. EVG's metrology solutions are optimized to maximize our customers' production yields, featuring:
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Wafer Inspection Products
Sonix provides manual and automated wafer inspection and metrology systems for wafers ranging from 100mm to 300mm, with extensive analysis capabilities at both the wafer and device level. These industry-leading automated wafer inspection systems are used by the world’s top manufacturers to ensure quality from development through production.
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CT PT Tester
HTFA-103A / 336
Wuhan Huatian Electric Power Automation Co., Ltd.
Used for automatic testing of protective and metrological CT/PT.
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Thin Film Metrology Systems
Gemini Series
The n&k Gemini-TF, Gemini-TF-M and Gemini-FPD are specifically designed for measurements of patterned and unpatterned films on transparent or opaque substrates. These tools are used extensively for solar cell, flat panel and photomask applications. The tools belonging to the Gemini-TF Series are based on unpolarized Reflectance (R) and unpolarized Transmittance (T) measurements, with a 50μm spot size for both R and T. R and T are simultaneously measured to determine film thickness and n and k spectra from 190nm – 1000nm
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Three-Phase Meter Test Equipment
ASTEL 3.2 TYPE
ASTeL 3.2 meter test equipment is a fully automatic system that enables simultaneous, multi-position calibration and verification of three-phase electric energy meters. ASTeL 3.2 offers full compatibility with IEC 60736. Thanks to excellent parameters, superior functionality and outstanding flexibility, ASTeL 3.2 is an ideal solution for utility companies, energy meter manufacturers, governmental institutes of metrology, metrological laboratories, and other customers interested in electricity meters testing.
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Ultrastable Microwaves
Ultra-stable microwave sources are paramount for a broad range of applications, including precision metrology, deep space navigation, telecom and next generation wireless communication, as well as coherent radar. With the PMWG-1500 Menlo Systems offers a unique commercial solution for providing ultrastable microwaves in an all-in-one solution.
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Compact General-Purpose Metrology System
Benchmark 250
The Benchmark 250 is a compact general-purpose metrology system with all the features and capabilities of the larger VIEW Micro-Metrology models. With travel of 300 x 150 x 150 mm, the Benchmark can accommodate a wide range of part sizes, and is rugged enough to be located in either a Q/A lab or an inspection station on the production floor.
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Materials Metrology
VeraFlex Family
World-class XPS and XRF metrology technologies for semiconductor process control.
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Micro-spot Spectroscopic Reflectometry
FilmTek 2000M
Scientific Computing International
Micro-spot size benchtop metrology system engineered for unparalleled versatility and high performance, meeting the needs of patterned film applications requiring a very small spot size. Allows for measurement spot sizes as small as 2µm, and delivers reliable measurement of both thin and thick films.
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Programming
You are looking for a LabVIEW-solution for a test problem? LabVIEW is an excellent development environment for all areas of metrology. Here we have extensive experience and can help in your test problems. In the LabVIEW programming language, we develop VIs (Virtual Instruments) that can be integrated easily in TestStand. Using hardware-oriented programming languages such as C# and LabVIEW, we develop integrations of control and measurement components.
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Production Camera Test System
Meridian
Designed for rapid customization, the Meridian product line offers a revolutionary hardware and software approach to production camera testing. It's a flexible test tool kit that's compact, cost-effective and easy to incorporate in your production line: the graphical user interface facilitates setup and selection of metrology parameters; and a library of functions integrates easily into your testing software.
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High Precision Angular Position, Calibration and Geometry Inspection
GeoOrdinate
Rotary Precision Instruments UK Ltd
Ultra precise rotary tables intended for fine inspection, metrology and test applications.The GeoOrdinate has been designed specifically for the inspection of large and heavy components and is fully compatible with any shop floor environment whilst maintaining world class accuracies more commonly seen in the standards laboratory.
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Sphygmomanometer Calibrator
Huaxin Instrument (Beijing) Co., Ltd
Here at Huaxin, as an expert test equipment solution provider, we are proud to offer a selection of pressure calibrators for precise calibration of sphygmomanometer in laboratory and on site. Our sphygmomanometer calibrators find wide applications in metrology bodies, hospitals, university labs, etc.
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Metrology System
IVS
The IVS 220 system is the latest generation in the IVS series and has been designed for ultimate precision, TIS (tool induced shift) and throughput on 200mm wafers. The cornerstone of the system’s reliability and stability is its mean time between failure (MTBF) of 2,100 hours. The IVS 280 provides the same capability in a package designed for overhead track handling with full E84 GEM300 capability.
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3D Metrological Software
InnovMetric PolyWorks
Powerful metrological software which can effectively process vast amounts of data from 3D scanners in real time. Due to its modular architecture the software covers a large number of applications: one-point inspection by touch measurement systems, scanned data processing and data comparison to CAD models or complete reverse engineering – CAD model creation.
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Software
Metrology systems vary significantly in their utility, which is largely a function of software. The software ultimately determines what the system can do, and if certain capabilities, commands, or calculations are absent, it can severely compromise productivity.
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Inspection System
Pixie
3-D Metrology for automation. Pixie is a standard system for automated optical quality inspection. Pixie can be configured with 2 to 5 servo driven axis movement and the high-speed measurement capabilities make it suitable for inline and stand-alone solutions.
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Electrodeless Z-Pinch™10 Watt EUV Source
EQ-10
The EQ-10 is a compact, easy-to-use, reliable, and cost-effective EUV light source, based on Energetiq's proven Electrodeless Z-pinch™ technology using Xenon gas. The EQ-10 EUV source is uniquely suited for metrology and research applications.
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CT PT Tester
HTFA-109 / 342
Wuhan Huatian Electric Power Automation Co., Ltd.
Used for automatic testing of protective and metrological CT/PT.
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Optical Filter Sets
Our filter sets support a great range of fluorophores for microscopes and imaging systems. Patented design techniques drive some of the most spectrally sophisticated optical filters on the market. High transmission, steep edges, precise spectral edge placement, and optimized blocking combine for more reliable measurements. A wide selection of individual bandpass filters and dichroic beam-splitters support unique applications, and world-class manufacturing and cutting-edge metrology ensure consistent performance that always meets specifications.
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Reticle Manufacturing
An error-free reticle (also known as a photomask or mask) represents a critical element in achieving high semiconductor device yields, since reticle defects or pattern placement errors can be replicated in many die on production wafers. Reticles are built upon blanks: substrates of quartz deposited with absorber films. KLA’s portfolio of reticle inspection, metrology and data analytics systems help blank, reticle and IC manufacturers identify reticle defects and pattern placement errors, thereby reducing yield risk.
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Metrology System
IMPULSE V
With tighter wafer-to-wafer and within-wafer uniformity tolerances, integrated metrology systems are in use across various semiconductor processing steps. Based on demonstrated high-resolution optical technology, the IMPULSE V system provides higher sensitivity to thin film residue measurements during the CMP process. The IMPULSE platform boasts the industry’s most reliable hardware with best-in-class reliability and productivity metrics.
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Dimensional Metrology
Integrated Metrology Family
Nova is the market leader in the space of integrated metrology platforms with multiple generations of products. Our integrated metrology platforms enable advanced process control (APC) to monitor and control wafer to wafer variations of complex high-end CMP and Etch applications with high productivity and reliability required for the most advanced logic and memory technology nodes.
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kSA ICE
The k-Space Integrated Control for Epitaxy system (ICE) is a modular in situ metrology tool designed for today’s MOCVD and MBE reactors. It combines kSA MOS, kSA BandiT and kSA RateRat Pro patented technologies along with an Emissivity Corrected Pyrometry (ECPR) module. The kSA ICE modular design allows the user to specify which modules will be used in their kSA ICE configuration.
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Laser Interferometers
ZYGO laser interferometers support and enable the most demanding metrology applications in industries from semiconductor and lithography to space-borne imaging systems, cutting-edge consumer electronics, defense-related IR and thermal imaging systems and ophthalmics.
