Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Product
Micro-spot DUV Reflection and Transmission Spectrophotometry
FilmTek 3000 PAR
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Scientific Computing International
Metrology system with a 50µm spot that delivers high-performance transmission and reflection measurement of patterned films deposited on transparent substrates. Ideally suited for measuring the thickness and optical constants of very thin absorbing films.
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Product
microRSP
M200
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The window of acceptable sheet resistance is shrinking with each technology node resulting in increasingly more rigorous standards for scale and accuracy of metrology tools. The shortcomings of traditional types of 4 point probes are becoming more and more evident. By developing the microRSP-M200, a unique tool for measuring the sheet resistance of conducting films, hereunder ultra shallow junctions (USJ’s), CAPRES A/S has responded to the growing need for reliable sheet resistance measurements on micro scale.
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Product
Hi Rate Multi-Pixel Detection
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Systems utilizing multiple electron beams are an emerging semiconductor metrology technology that aims to increase throughput. El-Mul is a pioneer in developing detection solutions for such metrology systems and has designed and manufactured prototype detectors that can simultaneously detect 144 beams at 35MHz.
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Product
kSA ACE
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The kSA Atomic Control for Epitaxy (ACE) metrology tool is a highly sensitive instrument that measures the in situ flux rate of atomic species using the principle of atomic absorption spectroscopy.
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Product
Displacement Transducers
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Displacement transducers are suitable for direct, accurate measurement of displacements in automatic control and metrology.
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Product
Scatterometers/ Thin Film Metrology Systems
LittleFoot Series
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The n&k LittleFoot-CD, and LittleFoot-CD450 are DUV-Vis-NIR scatterometers/thin film metrology systems, based on polarized reflectance measurements (Rs and Rp) from 190nm to 1000nm, with microspot technology. The systems in the LittleFoot-CD Series determine thickness, n and k spectra from 190nm-1000nm of thin films, as well as depths, CDs, and profiles of trenches and contact holes.
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Product
Scatterometer with Thin Film Measurement Capabilities
OptiPrime-X Series
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The n&k OptiPrime-X series are automated metrology systems used to fully characterize and monitor Thin Film and OCD applications for both current and next generation IC processes.
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Product
Universal 3D Measurement Software
Metrolog
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Get a real performance accelerator for your 3D measuring devices and more.Not only does Metrolog X4 architecture benefit from current computer and OS technologies significantly increasing the performances and metrology software throughput, but it also simplifies your day-to-day measurement workflow.
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Product
Benchtop 3D Optical Profilometers
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Compact, non-contact metrology instruments used for high-precision, sub-nanometer to micrometer-level measurement of surface topography, roughness, and step heights.
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Product
Thermistor Power Meter
N432A
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Keysight N432A is the replacement for Keysight's legacy 432A analog thermistor power meter. The single-channel, average RF power meter operates with the Keysight 8478B and 478A thermistor mounts. The N432A-and-thermistor-mount pair is ideal for applications that require high measurement accuracy, particularly in metrology and calibration laboratory environments. The enhanced thermistor power meter comes with a digital color LCD display, and user-friendly front panel interface. Its built-in calibration factor table provides a more convenient and accurate method of storing calibration factors as compared to the old knob-turning approach of the 432A. The N432A is LXI compliant, and programmable via GPIB, USB and LAN.
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Product
Precision LCR Meter
1693
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The GenRad 1693 LCR Meter Bridge gives you the best combination of features, in an LCR meter, to meet your most demanding testing requirements. It's a versatile, flexible instrument with a full range of programmable test frequencies, speeds, and voltages. An easy to understand display show both primary and secondary measurement parameters. The Digibridge is an excellent choice for metrology applications requiring accurate and repeatable measurements. The 1693 is also widely used in production testing, incoming inspection, component design and evaluation, process monitoring or dielectric measurement applications.
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Product
Single-Phase Meter Test Equipment
ASTEL 1.2 TYPE
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ASTeL 1.2 meter test equipment is a fully automatic system that enables simultaneous, multi-position calibration and verification of single-phase electric energy meters. ASTeL 1.2 offers full compatibility with IEC 60736. Thanks to excellent parameters, superior functionality and outstanding flexibility, ASTeL 1.2 is an ideal solution for utility companies, energy meter manufacturers, governmental institutes of metrology, metrological laboratories, and other customers interested in electricity meters testing.
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Product
Xytronic Single-Phase Reference Standard +/- 0.04%, +/- 0.02%, +/- 0.01%
RADIAN RX-20, RX-21 and RX-23
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Radian Research is committed to providing our customers with leading innovative and technologically superior products, while maintaining metrology capability in power and energy measurement that is surpassed by none. Our engineers drew on the expertise and knowledge we acquired for our industry-leading legacy RM (Metronic) and RD (Dytronic) reference standards to develop the RX (Xytronic), the ultimate in power and energy measurement technology perfection.
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Product
Current Transformers
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Excellent measurement technology requires high-quality current transformers. The product portfolio comprises a wide range of current transformers for load currents (operating currents) and residual currents (RCM). Different designs cover a variety of installation situations and metrological requirements, and enable retrofitting. AC/DC sensitive measuring current transformers use a special measurement method to detect both AC and DC currents of different frequencies.
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Surface Profilers
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Taylor Hobson offers a world leading range surface form, surface finish and metrology solutions for 3D contour,ideal for the most demanding applications.
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Product
kSA ICE
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The k-Space Integrated Control for Epitaxy system (ICE) is a modular in situ metrology tool designed for today’s MOCVD and MBE reactors. It combines kSA MOS, kSA BandiT and kSA RateRat Pro patented technologies along with an Emissivity Corrected Pyrometry (ECPR) module. The kSA ICE modular design allows the user to specify which modules will be used in their kSA ICE configuration.
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Product
3D Inspection Software
Metrolog X4
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Metrolog X4 architecture is designed not only to benefit from current computer and OS technologies (Windows 64-bit, and multiprocessor PCs) that significantly increase the performances and throughput of your Metrology software, but is also aimed at simplifying your day-to-day measurement work. Metrolog X4 is a perfect Point Cloud software able to analyze large data size. High Performances in Point Cloud analysis: Large Data file import (CAD files, Point clouds, ...)
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Product
TE-Metrology
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HIGHVOLT Prüftechnik Dresden GmbH
The TE measurement complements the high voltage test and is part of the routine and type testing of numerous electrical devices. It is one of the most important non-destructive methods for detecting faults in electrical installations. The breakdown of an insulating material usually occurs at an internal weak point, which usually already shows a partial discharge activity in advance. For this reason, measuring partial discharges can help prevent costly damage. The TE measurement is thus used for quality testing and diagnosis in the factory as well as during on-site testing of cables, GIS, power transformers and transducers or rotating machinery and their components
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Product
Automatic Online Flatness and Surface Appearance System
UltraSort200
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The UltraSort continues our 25 year tradition of providing metrology solutions to semiconductor wafer manufacturers. Designed for volume wafer production, this automated system offers superior performance in rapid, repeatable, accurate, noncontact qualification of silicon and alternative substrate wafers.
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Product
Measurement Systems
MicroMeasure3D
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Sciences et Techniques Industrielles de la Lumière
STIL MicroMeasure3D, PORTICO3D and MAESTRO3D are measurement systems designed to achieve true 3D metrology of each point for the most demanding applications adapted to Industry 4.0 standards.
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Product
Packaging Manufacturing
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KLA’s extensive portfolio of packaging solutions accelerates the manufacturing process for outsourced semiconductor assembly and test (OSAT) providers, device manufacturers and foundries for a wide range of packaging applications. Innovations in advanced packaging, such as 2.5D/3D IC integration using through silicon vias (TSVs), wafer-level chip scale packaging (WLCSP), fan-out wafer-level packaging (FOWLP) and heterogeneous integration as well as a wide range of IC substrates create new and evolving process requirements. KLA offers systems for packaging inspection, metrology, die sorting and data analytics focused on meeting quality standards and increasing yield before and after singulation. SPTS provides a broad range of etch and deposition process solutions for advanced packaging applications. Orbotech offers a portfolio of technologies that includes automated optical inspection (AOI), automated optical shaping (AOS), direct imaging (DI), UV laser drilling, inkjet/additive printing and software solutions to ensure manufacture of the highest quality of IC substrates.
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Product
kSA SpectR
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The kSA SpectR is a complete metrology solution for measurement of absolute spectral reflectance, growth rate and end point detection. Custom spectral features such as reflectance minima, maxima, inflection points, or baseline scatter level, over a user defined wavelength range of interest, are easily measured.
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Product
Post Dicing
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Camtek offers dedicated inspection and metrology solutions for dicing-related processes, ensuring the reliability of the end product. Camtek developed new capabilities to address new dicing technologies such as Stealth and Plasma dicing using new algorithmic and technologies such as Back Light illumination, as well as various handling solutions.
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Product
Toolmakers Microscope
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Sinowon Innovation Metrology Manufacture Ltd.
It is widely used in mechanical, meter, electronic and light industry; university, Institute and metrology department. The measuring profile projector can detect the contour dimension and surface shape of variety complex workpiece, such as templates, punching pieces, cams, threads, gears, molding milling cutters.
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Product
Substrate Manufacturing
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KLA’s substrate manufacturing portfolio includes defect inspection and review, metrology and data management systems that help substrate manufacturers manage quality throughout the wafer fabrication process. Specialized wafer inspection and review tools assess wafer surface quality and detect, count and bin defects during production and as a critical part of outgoing wafer qualification. Wafer geometry systems ensure the wafer shape is extremely flat and uniform in thickness, with precisely controlled wafer shape topography. Data analysis and management systems proactively identify substrate fabrication process excursions that can lead to yield loss. KLA’s substrate manufacturing systems support process development, production monitoring and final quality check of a broad range of substrate types and sizes including silicon, prime silicon, SOI, sapphire, glass, GaAs, SiC, GaN, InP, GaSb, Ge, LiTaO3, LiNBO3, and epitaxial wafers.
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Product
Optical CMM Systems
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Our OmniLux metrology system is highly versatile and provides unparalleled levels of 3D CMM capture for component measurement in seconds. This high precision non contact, metrology system is extremely versatile because it measures components of any geometry and of any material. Geometries possible include: spheres, asphere, cylinder, internal bore, cone/taper, step height or freeform in any material such as polished or rough metals or ceramics and polymers. The Omnilux is fast and accurate because, unlike direct contact sensors, the use of optical sensors means that the whole surface can be analysed while the object is suspended in space, ensuring that no damage comes to delicate surfaces. Our easy-to-use software interface, developed from years of experience enables the operator to effortlessly control the system. Rich data analysis, automation and export of results for the immediate generation of reports as well as a compact footprint means OmniLux is the leading solution for production or R&D environments where reducing cycle times is critical to sustainable success.
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Product
Metrology Device
XPLOR 100
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XPLOR 100 is a state of the art, fully automated metrology device designed for measurement and analysis of bubbles and inclusions for optical substrates in the Visible and NIR wave-bands.
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Product
High Precision Angular Positioning, Calibration and Geometry Inspection
LabStandard DUO
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Rotary Precision Instruments UK Ltd
Ultra precise rotary tables intended for fine inspection, metrology and test applications.2 axis design for rotary tilting applications with self-locking worm gearing and a high accuracy angular encoder ensures sensitivity and fine positioning for metrology and precision testing.
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Product
Programming
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You are looking for a LabVIEW-solution for a test problem? LabVIEW is an excellent development environment for all areas of metrology. Here we have extensive experience and can help in your test problems. In the LabVIEW programming language, we develop VIs (Virtual Instruments) that can be integrated easily in TestStand. Using hardware-oriented programming languages such as C# and LabVIEW, we develop integrations of control and measurement components.
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Product
Rotational Metrology System
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The ZeroTouch® Rotational Metrology System is a precise, high-speed, in-line or near-line metrology, and inspection system that measures critical dimensions of rotors, stators, brake discs, and other cylindrical parts, providing manufacturers with real-time metrology, and inspection data to optimize production processes, detect defects, and improve ROI.
