Probing Stations
System to contact DUTs to drive and receive signals.
See Also: Probing, Probers, Nano Probes
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Product
Cryogenic Probe Station
CPX-VF
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The Lake Shore CPX-VF probe station enhances the standard probe station capabilities with the addition of a ±2.5 T vertical field superconducting magnet. It can do all the standard C-V, I-V, microwave, and electro-optical probing of the CPX, plus out-of-plane vertical field superconducting magnetic measurements. Researchers can use it to perform Hall effect measurements and test magneto-transport parameters. The CPX-VF is one of Lake Shore’s premium probe stations for combining microwave measurements with magnetic field.
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Product
Fully Manual Systems
SPS-1000, SPS-2000, and SPS-2200
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The SPS-1000, SPS-2000, and SPS-2200 systems are MicroXact’s premier manual probe stations designed to be flexible and easy to use. The high level of performance and affordability of these manual probe systems put them in a class of their own.
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Product
Probe Station
ETCP1000
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Installation of “Hot and cool chuck” - Sellectable chuck size : 4inch, 6inch. - Temperature variation : -193°C ~ 300°C (80K ~ 573K) - Additional requirements : Vacuum chamber, LN2 tank(Bombei), microscope, CCD camera, manipulators. - EPS500 is standard model in ETCP1000 probe station.
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Product
Cryogenic Probe Station
EMPX-HF
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The Lake Shore EMPX-H2 probe station enhances standard probe station capabilities with the addition of a ±0.6 T horizontal field electromagnet. All standard C-V, I-V, microwave, and electro-optical probing, plus in-plane horizontal field electromagnetic measurements can be performed on this versatile station. Researchers can use it for testing magneto-transport parameters. The EMPX‑H2 is Lake Shore’s premier probe station for vector-dependent magneto-transport measurements.
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Probe Systems
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We offer a complete line of premium performance analytical probe stations for precise device test and measurement directly on wafer.
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Mini Probe Station
C-2
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The smallest probe station which still preserves the key functions and precision that are fundamental to all probing. This size is still capable of DC and RF measurements, making it the most versatile in its size.
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Product
Cryogenic Probe Station
CRX-4K
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Designed for versatility and high performance, the CRX-4K is our premium cryogen-free closed-cycle refrigerant probe station. This system is the solution for those looking for the convenience of cryogen-free operation and the exceptional measurement performance of a Lake Shore product.
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Product
Flying Probe Programming & Test Development
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Testing House offers full Flying Probe Programming and Test Development using its very own Seica Pilot LX Flying Probe Test Stations.
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Product
CC-TLP Probe
CC-TLP-50-A1
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High Power Pulse Instruments GmbH
*Capacitively coupled TLP probearm (CC-TLP) compatible with standard probing stations*18 GHz SMA connector*Tilt angle adjustment*Calibration gauge for needle height
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Product
Laser Scanning and Emission Tools
InfraScan™ 400TDM
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The InfraScan™ 400TDM is the newest evolution of Checkpoint’s pioneering top-down laser scanning and emission tools. This tool is specifically designed to accommodate any commercially available probe station, up to 300 mm wafers.
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Product
Cryogenic Probe Station
FWPX
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Lake Shore’s FWPX probe station is designed for researchers who require large-size wafer probing. The FWPX accommodates wafers up to 102 mm (4 in) in diameter and can be modified to accept up to 152 mm (6 in) wafers. This general-purpose probe station is designed for researchers or engineers conducting material characterization tests over large samples. It is also an effective unit for measuring organic materials.
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Line Automation Equipment
5000 Series In-line Handler
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The Circuit Check 5000 Series In-line Handler is an integrated inline solution that combines automation, fixturing and measurement hardware in addition to other in-line PCBA probe based test stations, while adding a standardized quick change fixture interface. The 5000 series in-line is a unified solution that is software and hardware agnostic, enabling adaptability to a variety of off-the-shelf lower cost ICT, flash and functional test software and hardware.
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Product
Probe Card
T90™ Series
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The 90 mm tile was designed for mounting on a standard 4.5″ probe card holder for multi-site wafer level reliability testing. The 1.6 mm (0.062″) thick rails allow the chassis to slip into planarity adjustable probe card holders for most analytical probe stations.
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Product
Cryogenic Probe Station
CryoPro
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Materials Development Corporation
The MDC Model 441 Cryogenic Probe Station is a cost effective alternative to high-priced vacuum based cryogenic probe stations. With up to five probes available and sample diameters up to six inches, the MDC Cryogenic Probe Station allows for electrical measurements at temperatures near liquid nitrogen levels (77K).
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Product
Probing Solutions
ES62X-CMPS
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The ES62X-CMPS compact manual probe station is a rugged wafer probing solution designed for high reliability, compact size and low investment cost. It enables manual wafer level measurements up to 300 mm wafers. The probing station can also be used for TLP, HMM, HBM, LV-Surge, RF, S-parameter and DC-measurements. Micro positioners with vacuum as well as magnetic base can be attached. The chuck has a vacuum interface for the wafer and is electrically isolated. Multiple 4 mm connectors can be used to connect a voltage potential to the wafer backside.
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Product
Semi-Automatic Probe Station
P300A
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The P300A probe station is the most stable, intuitive, and space efficient 300mm semi-automatic analytical probe station available today. Designed for low current, sub-micron positioning applications, the P300A comes standard with features such as single-point ground, dry/dark environment, and integrated thermal chuck plumbing.
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Product
C-V Plotters
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Materials Development Corporation
MDC will tailor your CSM/Win Semiconductor Measurement System for your exact requirements. Choose the best capacitance meter, output device, and probe station for your needs. All CSM/Win C-V plotters feature the latest Dell Computers. The computer and capacitance meters are rackmounted in one compact enclosure. When ordered with a hot chuck or probe station, MDC can deliver a turnkey system of unparalleled performance.
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Product
Probe Station
EPS300
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Reasonable price and compact design. - Sellectable chuck size : 4inch, 6inch, 8inch when ordering probe station. - Hot chuck can be installed. Temp range: RT ~ 300°C - Hot and cool chuck from 0 °C ~ 300 °C can be provided.
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Product
Probe Station
S-1160
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S-1160 Probe Station 100mm, 150mm and 200mm wafer stage's completely manual and user friendly.
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Product
Hot Chucks
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Materials Development Corporation
Probe stations to suit all measurement requirementswhether production, engineering or research. See individual data sheets for more details.
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Optoelectronics and Photonics
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SemiProbe has developed probe stations for a wide variety of optoelectronic and photonic device applications, including light emitting diodes (LEDs), vertical cavity surface emitting lasers (VCSEL) and photo diodes. Testing and handling small, fragile, thin wafers with thousands of die on them poses unique challenges that require innovative solutions.
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Probe Systems
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These flexible probe stations are designed for the ever-changing test configurations required in a engineering lab. Combined with durable probes or your own high-speed probes, PacketMicro probe stations are the most cost-effective probing solutions in the industry.
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Product
Custom solutions
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Novacam develops custom interferometric solutions to address particular inspection and imaging needs of specialized applications and OEM markets. Our modular interferometer components offer a superior and cost-effective platform for developing high-performance systems and assemblies. We will collaborate with your application experts to devise the optimal combination of inteferometric (OCT) hardware, non-contact fiber-based sensor probes, and system software.As needed, Novacam engineers: develop customized optical probes and inspection stations develop inline probe fixtures for production environments adapt Novacam standard interferometer component modules to suit your application help integrate Novacam systems or components with third-party tools write customized software
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Product
Analytical Probe Station with Laser Cutting System
LCS- 4000 Series
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The LCS-4000 Probe Station with Integrated Laser Cutting System gives the user maximum flexibility in semiconductor diagnostic cutting, failure analysis, trimming, marking and topside layer removal. All of these functions can be performed on a microscopic level, all on this one system which provides a high level of performance that is remarkably easy to use.
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Wafer Test Solutions
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Wafer Test Solutions has established leadership positions in developing and deploying application-specific test solutions for MEMS devices, offering wafer and frame probing stations suitable for R&D, Wafer Sort, and Final Test. We offer state-of-the-art solutions to test environmental and motion sensors in wafer and other advanced packages.
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Probe Stations
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PSI's 600LS Series Probe Station is designed to exceed performance metrics of equipment priced significantly higher.
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Product
Recirculating Chillers
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Recirculating chillers from Lake Shore offer high performance for improved cooling capacity for your Hall measurement system, VSM, probe station, or electromagnet application.
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Probe Cards
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PICOPROBE® PROBE CARDS by GGB Industries, Inc., allows for more chip design flexibility because each probe card is custom configured to your circuit for testing wafers on either manual or automatic probe stations. Probe cards with complex layouts consisting of numerous DC contacts and multiple microwave probes with operating frequencies of 40, 50, 67, or 110 GHz can be custom fabricated quickly and inexpensively.
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Product
Vector Network Analyzer Extenders
VNAX
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VDI''s VNA Extenders deliver high performance network analyzer frequency extension into the THz range. Models cover 50 GHz to 1,100GHz with additional bands in development. VDI modules come in a variety of form factors and configurations including our original Standard-size Modules and new Mini Modules that reduce volume up to 75%. In addition to our full Transceiver (TxRx) modules, VDI also offers Transmit-Reference (TxRef) modules and Receive only (Rx) modules that deliver optimized performance for specific applications. These modules combine high test port power and exceptional dynamic range to deliver industry leading performance. They are compatible with most network analyzers and can be integrated into probe stations and antenna chambers.
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Product
Sealing Kit for PHD-4001A on Cascade Elite E300, Octagon CM300 Probe Station
PHD-4001-TH-Seal
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High Power Pulse Instruments GmbH
*Sealing Kit for PHD-PPM10-H9 and PHD-4001A on Cascade Octagon CM300 probe station*High temperature range -40 °C to +200 °C





























