Thin Film
layer of material ranging < a nanometer to > a micrometer in thickness.
See Also: Film, Ellipsometers
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Thin Film Metrology Systems
Gemini Series
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The n&k Gemini-TF, Gemini-TF-M and Gemini-FPD are specifically designed for measurements of patterned and unpatterned films on transparent or opaque substrates. These tools are used extensively for solar cell, flat panel and photomask applications. The tools belonging to the Gemini-TF Series are based on unpolarized Reflectance (R) and unpolarized Transmittance (T) measurements, with a 50μm spot size for both R and T. R and T are simultaneously measured to determine film thickness and n and k spectra from 190nm – 1000nm
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Scatterometers / Thin film Metrology Systems
Olympian Series
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DUV-Vis-IR (Wavelength Range: 190nm – 15,000nm) Scatterometers / Thin Film Metrology Systems: The n&k Olympian, n&k Olympian-450 and n&k Olympian-M are DUV-Vis-IR scatterometers/thin film metrology systems with micro-spot technology, covering the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s DUV-Vis-NIR scatterometer series – the OptiPrime-CD Series.
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Thin Film Design Software
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Scientific Computing International
SCI offers software tools for optical thin film design, material analysis, ellipsometry, and spectrophotometry. SCI’s current standalone optical thin film software includes:
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Thin Film Lithium Tantalate (TFLT™) Pyroelectric Detectors
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For room temperature measurement of THz sources, from nW to mW.
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Thin Film Based Thermopile Detector: 1 Channel
DR46 Compensated
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A one-channel compensated thin-film thermopile in a TO-8 package. The active area and compensating element area are 4mm x 0.6mm each. Offers high output with very good signal-to-noise ratio. Internal aperture minimizes channel-to-channel crosstalk increasing sensitivity.
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Thin Film Circuits
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SemiGen offers build-to-print services for a wide range of materials and metallization schemes. We use our processing technology to fabricate circuits on As-Fired Alumina, Polished Alumina, Superstrate TPS, Aluminum Nitride, Beryllium Oxide, Fused Silica/Quartz, Sapphire, and Hi-K Dielectrics.
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In-Situ Spectroscopic Ellipsometer for Real-Time Thin Film Monitoring
UVISEL Plus In-Situ
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The UVISEL Plus in-situ spectroscopic ellipsometer can be easily mounted on process chambers (PECVD, MOCVD, sputter, evaporation, ALD, MBE) for the real-time control of thin film deposition or etch processes.The UVISEL Plus in-situ provides the unique combinations of very high speed, sensitivity, dynamic range and accuracy making the instrument able to control deposition / etch at the atomic layer thickness level, even for rapid processes.
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Spectroscopic Ellisopmeter for Simple Thin Film Measurement
Auto SE
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The Auto SE is a new thin film measurement tool that allows full automatic analysis of thin film samples with simple push button operation.Sample analysis takes only a few seconds and provides a complete report that fully describes the thin film stack – including film thicknesses, optical constants, surface roughness, and film inhomogeneities.
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Scatterometer with Thin Film Measurement Capabilities
OptiPrime-X Series
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The n&k OptiPrime-X series are automated metrology systems used to fully characterize and monitor Thin Film and OCD applications for both current and next generation IC processes.
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Thin Film Based Thermopile Detector: 10 Channels
10 Channel
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A ten-channel thin-film thermopile in a TO-8 package. Each active area is 3.16mm x 0.4mm and offers low noise voltage. Internal aperture minimizes channel-to-channel crosstalk while increasing sensitivity.
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Passive and Active Resistor Trimming for Thick and Thin Film
LRT 2000L
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*Travel: 6" x 6"*Laser : Fiber Laser Ytterbium 1064 nm*Kerf: 30 to 80 micron Adjustable*Pulse width : 80 nano second*Rap Rate: 1 to 1 million Pulse Per Second*Average Power: 20 watts*Target: Electric crosshair on monitor
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Thin Film Based Thermopile Detector: 3 Channels, Compensated
T34 Compensated
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A three-channel compensated (6 element) thin-film thermopile in a TO-8 package. Each active area is 3.16mm x 0.4mm. Offers thermal compensation to minimize effect of sudden ambient temperature change. Internal aperture minimizes channel-to-channel crosstalk while increasing sensitivity.
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Compact Passive and Active Resistor Trimming for Thick and Thin Film
LRT 2000C
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*Travel: 6" x 6"*Laser : Fiber Laser Ytterbium 1064 nm*Kerf: 30 to 80 micron Adjustable*Pulse width : 80 nano second*Rap Rate: 1 to 1 million Pulse Per Second*Average Power: 20 watts
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Thin Film Based Thermopile Detector: 2 or 1 Channels
DR46
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A two-channel or a one-channel compensated thin-film thermopile in a TO-8 package. Each active area is 4mm x 0.6mm. Offers high output with excellent signal-to-noise ratio. An internal aperture minimizes channel-to-channel crosstalk increasing sensitivity.
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Scatterometers / Thin Film Metrology Systems
OptiPrime Series
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The n&k OptiPrime series are automated metrology systems used to fully characterize and monitor Thin Film and OCD applications for both current and next generation IC processes.
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Optical Thin-Film Metrology for Advanced Thin Films
FilmTek 6000 PAR-SE
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Scientific Computing International
Production-proven metrology system for film thickness, refractive index and stress measurement for a broad range of film layers at the 1x nm design node and beyond. Accommodates 200 or 300 mm wafer metrology. Combines spectroscopic ellipsometry and DUV multi-angle polarized reflectometry with a wide spectral range to meet the challenging demands associated with multi-patterning and other leading-edge device fabrication techniques.
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Thin Film Chip Resistors, High Voltage Type
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Panasonic Industrial Devices Sales Company of America
Thin Film Chip Resistors, High Voltage Type by Panasonic
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Thin Film Chip Resistors, High Reliability Type
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Panasonic Industrial Devices Sales Company of America
An AEC-Q200 Compliant SeriesPanasonic components specified as AEC-Q200 Compliant are consistently designed into automotive systems. However, today’s Design Engineers are specifying AEC-Q200 components to meet the high-quality standards of devices beyond automotive applications.
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Reference Ellipsometer for Thin Film Measurements
UVISEL Plus
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The UVISEL Plus ellipsometer range offers the best combination of modularity and performance for advanced thin film, surface and interface characterization. FastAcq technology enables a sample measurement from 190 to 2100nm to be completed within 3 minutes, at high resolution. The possibility to continuously adjust the spectral resolution along the measurement range enables to scan a sample smarter and faster.
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Ultra Thin Film Scratch Tester
CSR5100
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The micro-scratch method (JIS R-3255), which is an evolution of the scratch method that evaluates the adhesion strength between the thin film formed on the material surface and the base material, enables the detection of peeling of thin films. detection, we have a highly sensitive destruction detection mechanism based on our own patented technology (Patent No. 5070146) to evaluate the adhesion strength of ultra-thin
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Thin Film/Metal Film Chip SMD Chip Resistors
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Panasonic Industrial Devices Sales Company of America
Panasonic’s industry leading Thin-Film Chip Resistors features include high reliability at high temperature and high humidity as well as high accuracy, low current noise and excellent linearity. Panasonic’s High Precision Thin Film Resistors are designed for robust applications where long life is crucial in markets such as automotive, appliance or industrial. These Resistors boast a high accuracy of up to 10ppm, 0.05% making them one of the best-in-class Resistors on the market today. Panasonic Thin-Film Resistors are available in case sizes down to 0201. Compliant standards include: IEC 60115-8, JIS C 5201-8, and EIAJ RC-2133B. These Resistors are AEC-Q200 Certified.
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XPS/ESCA Service
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X-ray Photoelectron Spectroscopy (XPS Analysis), also known as Electron Spectroscopy for Chemical Analysis (ESCA), is used to determine quantitative atomic composition and chemistry. It is a surface analysis technique with a sampling volume that extends from the surface to a depth of approximately 50-70 Angstroms. Alternatively, XPS analysis can be utilized for X-ray Photoelectron Spectroscopy (XPS) or Electron Spectroscopy for Chemical Analysis (ESCA) from Evans Analytical Group (EAG).sputter depth profiling to characterize thin films by quantifying matrix-level elements as a function of depth.
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Benchtop Metrology System
FilmTek 2000 SE
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Scientific Computing International
Benchtop metrology system delivering unmatched measurement performance, versatility, and speed for unpatterned thin to thick film applications. Ideally suited for academic and R&D settings. Combines spectroscopic rotating compensator ellipsometry, multi-angle polarized spectroscopic reflection, and intuitive material modeling software to make even the most demanding of measurement tasks simple and reliable.
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Hybrid Amplifiers
Gain Block
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Macom Technology Solutions Holdings Inc.
MACOM’s portfolio of hybrid amplifiers cover a frequency range of 10 kHz to 6 GHz. Each amplifier is designed to be unconditionally stable and have excellent cascadability. Our amplifiers are designed using thin film technology and are integrated components thindat include internal DC biasing circuitry, allowing them to maintain excellent electrical performance over the 55˚C to 100˚C range. Hermetically sealed and screened up to space level, these amplifiers are ideally suited for hi-reliability and mission critical applications.
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Spectroscopic Ellipsometry
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Spectroscopic ellipsometry is a surface-sensitive, non-destructive, non-intrusive optical technique widely used for thin layers and surface characterization. It is based simply on the change in the polarization state of light as it is reflected obliquely from a thin film sample. Depending on the type of material, spectroscopic ellipsometers can measure thickness from a few Å to tens of microns. It is also an excellent technique for multi-layers measurement.
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100G,200G 1X2 DWDM Device (3Ports)
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Flyin optronics’ 100GHz/200GHz 1x2 wavelength multiplexer utilizes thin film coating technology and proprietary design of non-flux metal bonding micro optics packaging to achieve optical add or drop at a ITU wavelength. It provides ITU channel center wavelength, low insertion loss, high channel isolation, wide pass band, low temperature sensitivity and epoxy free optical path . It can be used for wavelength add/drop in telecommunication network system.
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40-CH 100G Athermal AWG
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Athermal AWG(AAWG) have equivalent performance to standard Thermal AWG(TAWG) but require no electrical power for stabilization. They can be used as direct replacements for Thin Film Filters(Filter type DWDM module) for cases where no power is available, also suitable for outdoor applications over -30 to +70 degree in access networks. Flyin’s Athermal AWG(AAWG) provide excellent optical performance, high reliability, ease of fiber handling and power saving solution in a compact package. Different input and output fibers, such as SM fibers, MM fibers and PM fiber can be selected to meet different applications. We can also offer different product packages, inluding special metal box and 19” 1U rackmount.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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Micro-spot DUV Reflection and Transmission Spectrophotometry
FilmTek 3000 PAR
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Scientific Computing International
Metrology system with a 50µm spot that delivers high-performance transmission and reflection measurement of patterned films deposited on transparent substrates. Ideally suited for measuring the thickness and optical constants of very thin absorbing films.
