VPG 300 DI Maskless Stepper

VPG 300 DI - Heidelberg Instruments

The VPG 300 DI is an innovative direct write lithography system that redefines the capabilities of microfabrication. Tailored specifically for high-resolution applications, the VPG 300 DI seamlessly integrates the precision of traditional i-line steppers with the advantages of a maskless workflow. Leveraging an ultra-high-speed exposure optical engine, this system accelerates the innovation cycle from weeks to mere hours while maintaining exceptional imaging quality and patterning accuracy. With a minimum feature size as small as 500 nm, this state-of-the-art equipment is engineered to meet the rigorous demands of both industrial environments and academic research.