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Vacuum Chambers
Evacuate air simulating low atmospheric pressure at different elevations.
See Also: Chambers, TEM Cells, Acoustic Chambers, Altitude Chambers, Anechoic Chambers, Climate Chambers, Dust Chambers, Environmental Chambers, ESS Chambers, Humidity Chambers, Refrigerated Chambers, Reverberation Chambers, RF Chambers, Salt Spray Chambers, Sound Chambers, Temperature Chambers, Temperature Humidity Chambers, Thermal Shock Chambers, Ultra-high Vacuum
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Wafer Bonder
AML
Wafer bonding has found many applications in the field of MST, MEMS and micro engineering. These include the fabrication of pressure sensors, accelerometers, micro-pumps and other fluid handling devices. The process is also used for first-order packaging of silicon microstructures to isolate package-induced stresses. The OAI AML Wafer Bonder facilitates both the alignment and bonding to be performed in-situ, in a high vacuum chamber. For anodic bonding the wafers are loaded cold and heated in the process chamber. For high accuracy alignment the wafers are aligned and brought into contact only after the process temperature has been reached, thus avoiding differential thermal expansion effects which can compromise alignment. The AML Wafer Bonder is excellent for anodic bonding, silicon direct and thermal compression bonding applications. These features enable the bonder to be used with virtually any processing tool.
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Altitude & Space Simulation Test Chambers
Weiss Technik’s vast experience with altitude, thermal vacuum, low temperature and space simulation test chambers can provide you with the right solution. We offer both pre-engineered and custom altitude chambers for ultra-low cooling, extended mbar, and extended temperature ranges that will meet your testing exact requirement.
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Vacuum Discharge Test Equipment
DAC-VD-1
DAC-VD-1 can locate defective points such as scars or pinholes on stator coils and wires easily.By applying voltage in a vacuum chamber, the electric arcing from a defective part can be discoveredvisually in a short time. DAC-VD-1 can be used widely in variety of applications from product developments to outgoing inspections.
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Reach-In Vacuum Climatic Test Chamber
WEIBER Vacuum Climatic Test Chamber are rigid enclosures from which air and other gases are removed by a vacuum pump. This results in a low pressure environment within the chamber, commonly referred to as a vacuum. A vacuum environment allows researchers to conduct physical experiments or to test mechanical devices which must operate in outer space (for example) or for processes such as vacuum drying or vacuum coating.
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Low Outgassing Cables Suitable For Thermal Vacuum Chamber Exposure
Low Outgassing Cables Suitable for Thermal Vacuum Chamber Exposure.
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Wafer Bonding Systems
ith over 15 years experience in designing and manufacturing precision wafer bonding equipment, EVG wafer bonding systems are well recognized in setting industry standards for the MEMS production industry. Besides supporting wafer level and advanced packaging, 3D interconnects and MEMS fabrication, the EVG500 series wafer bonding systems can be configured for R&D, pilot-line or volume production. They accommodate the most demanding applications by bonding under high vacuum, precisely controlled fine vacuum, temperature or high pressure conditions. Multiple bonding methods including anodic, thermo compression, glass-frit, epoxy, UV and fusion bonding are covered. Based on a unique modular bond chamber design the EVG500 series allow for an easy technology transfer from R&D to high volume production.
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Vacuum UV Testing Services
The system consists of a high-vacuum chamber, multi-ported,equipped with deuterium and xenon sources for accelerated ageing. The specimen to be irradiated is mounted on a temperature-controlled platen, which, in turn is mounted on a XYZ J manipulator. Provision is made for the measurement of emissivity and absorptance without breaking vacuum and at the operating temperature.
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Ultra-High Vacuum Ф4 Scanning Kelvin Probe
The Ф4 Ultra-high Vacuum Scanning Kelvin Probe system gives the user full access to work function measurements under vacuum with the ability to alter the temperature from 77 K to 860 K. The Kelvin Probe measurement has resolution of 1 - 3 meV for a 2 mm tip on a conducting sample. The sample is mounted on a plate that is located on a motorized (x, y, z) translator attached to a stainless-steel vacuum chamber. Phi 4 also comes with a photoemission spectroscopy system with a tuneable source (3.4 - 7.0 eV). The deep ultra-violet (DUV) light spot measures approximately 3 x 4 mm. Absolute work function measurements can be obtained with this system in the range of 4.0 - 6.5 eV with an accuracy of 0.05 - 0.1 eV.
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Full spectrum direct reading spectrometer
TY-9000
Wuxi Tianmu Instrument Technology Co., Ltd.
The TY-9000 full-spectrum direct-reading spectrometer desktop spectrometer adopts international standard design and manufacturing process technology, adopts all-digital technology, replaces the huge photomultiplier tube (PMT) simulation technology, synchronizes with international spectrometer technology, adopts vacuum light chamber design And Full digital excitation source, leading CCD detector, high-speed data readout system, the instrument has high performance, very low detection line, long-term stability and repeatability.
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Probe Station
ETCP1000
Installation of “Hot and cool chuck” - Sellectable chuck size : 4inch, 6inch. - Temperature variation : -193°C ~ 300°C (80K ~ 573K) - Additional requirements : Vacuum chamber, LN2 tank(Bombei), microscope, CCD camera, manipulators. - EPS500 is standard model in ETCP1000 probe station.
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Combined Temperature and Altitude Environmental Test Chamber
Guangdong Bell Experiment Equipment Co.,Ltd
DGBell’s Altitude & Temperature Test Chamber combine Altitude and temperature to test various components and products, especially the aircraft avionics. Automatic controlled vacuum system provide a precise altitude simulated condition up to 30000 meters. Available to connect cable for the electronic performance test.
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Climatic Test Chambers
Dongguan Amade Instruments Technology Co., Ltd
Climatic test chambers are also referred as environmental test chambers, which is the general name of various test chambers that simulate the natural climate environment of raining, high temperature, low temperature, constant temperature, illumination, dewing etc, products including constant temperature chamber, constant humidity chamber, ozone aging test chamber, UV accelerated weathering tester, vacuum hot air oven, salt spray chamber, steam aging tester, rain test chamber, dust proof test chamber, ventilation aging chamber, xenon lamp weathering test chamber and so on.
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Deep Cooled Vacuum Ultra Violet Scientific Cameras
Syncerity VUV
High energy camera detection that can interface with a vacuum chamber for measurement down to 120 nm
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Thermal Vacuum Chamber
Telstar Vacuum Solutions offers innovative custom solutions in design, construction and installation of space simulation thermal vacuum chambers, specially developed to optimize testing efficiency.
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Cold Atomic Beam System
Detailed description of item: Complete cold atomic beam sources for alkaline-earth precision experiments and atomic devices. Small chambers with patented permanent-magnet Zeeman slowers and in-vacuum 2D MOT optics allow high flux with low outgassing and no thermal beam flux at the cold atom port, which provides a CF-133 connection to customer vacuum chamber. Advanced thermal design of the effusion oven allows long-lifetime operation at minimal heating power, with no water cooling. An integrated low-outgassing hot window is provided for coupling of on-axis Zeeman cooling light. Ion and getter pumps integrated into the chamber manage outgassing from the oven at temperatures up to 520 °C. Operating baseline pressures below 1×10-11 mbar can be attained in the customer’s downstream cold atom (typically 3D MOT) science chamber, with suitable pumping speed provided at the differentially-pumped cold beam output port.
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Vacuum Quality Monitor Systems
The 835 VQM is a mass spectrometer that operates from UHV to 10-5 Torr and accurately measures the gases in the vacuum chamber. The 835 VQM Differential Pump System delivers the advantages of the 835 VQM at higher pressures. The VQM system consists of an autoresonant ion trap mass spectrometer gauge, a VQM Controller and VQM Viewer software that that converts raw data into actionable information. The system is ratiometric, meaning that it determines the ratio of each gas to other gases in a vacuum chamber. It is usually coupled with a total pressure gauge to provide partial pressures of each gas as indication of the quality of the vacuum in the chamber.
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Ultra-High Vacuum
KP Technology offer a range of Kelvin Probes that work under ultra-high vacuum conditions, choose from single-point or scanning probes to add to your existing vacuum chamber, customize the UHV corner cube or consider the newest addition to the range, the Ф4 ultra-high vacuum scanning Kelvin Probe system.
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Climatic Testing
Environmental Test Chamber. Environment Associates' complete Climatic test facilities offer precise simulation of Temperature, Humidity, Altitude, Thermal Vacuum, Salt Fog, Sand and Dust, and Rain as well as many other specialized environments. Microprocessor Control along with calibrated recorded measurements and outstanding attention to detail by our technical staff make for a perfect test everytime.
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Vacuum Process And Chamber Environment Monitors
Our process monitors are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), analytical equipment, and control software. Process mass spectrometers are used in varied applications, including; Semiconductor, Thin Film (CVD, Etch, PVD and degas), pharmaceutical lyophylization and bulk gas purity monitoring.
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Accumulation Leak Detector
LDS3000 AQ
LDS3000 AQ is the first leak detector to use forming gas or helium in a simple accumulation chamber. Leak detector uses cost efficient forming gas or helium for accumulation leak testing. The LDS3000 AQ is very sensitive and can detect leaks down to the 10-5 mbar∙l/s range. It will detect fluid leaks as reliably as helium vacuum leak testing, but with cost nearly at the cost of air testing. The real differentiator: The leak detector uses the cost efficient forming gas or helium for accumulation leak testing.
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Helium Leak Testers
Yamaha Fine Technologies Co., Ltd.
Yamaha Fine Tech's proprietary low vacuum test realizes highly reliable measurement. With our proprietary low vacuum chamber system and helium gas detector, highly reliable inspections are conducted. Easy operation and easy maintenance are realized by a full fail-safe and sophisticated control system.
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TVAC Thermal Vacuum Test Chamber
Guangdong Test EQ Equipment co., Ltd.
- Space Environment Simulation: Replicates orbital conditions: thermal cycling, vacuum, and solar radiation (via optional xenon-arc lamps).- Precision Control: PLC-based automation with real-time data logging, remote access via LabVIEW/Modbus protocols.- Durable Construction: 304L stainless steel chamber, multi-layer MLI (multi-layer insulation), and vibration-damping mounts.- Safety Systems: Emergency venting, over-pressure relief valves, and redundant leak detection sensors.- Modular Design: Expandable with solar simulation, outgassing analysis, or cryogenic shroud add-ons.
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Fully Automatic Solar Cell
Module Laminator-H
1. Model: BSL2236OAC-H2. Effective lamination area: 2200mm × 3600mm3. Dimensions: length 17410mm × width 3665mm × height 2164mm4. Heating method: heat conduction oil heating5. Compressed air source pressure: 0.6～0.8MPa6. Working vacuum degree: 100～40Pa7. Evacuation rate: 70L/S8. Temperature control accuracy: ±1.5°C9. Temperature control range: room temperature - 180°C10. Temperature uniformity: effective lamination area≤±2℃11. Lamination chamber height: 30mm12. Evacuation time: depending on the process, it is recommended to take 5 to 8 minutes13. Upper cover stroke: 300mm
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Testing Services
Howland & Lawrence Chamber Services
RF shield testing: IEEE-299, MIL-STD-285, NSA 65-6CTIA CATL certification testing: Probe symmetry and amplitude ripple measurements following Test Plan for Wireless Device Over-the-Air PerformanceAnechoic material test, inspection, remediation: VSWR, inverse spherical nearfield testing of installed material and NRL arch screening tests of individual absorber pieces We can also provide in-process testing of welded steel shielded enclosures with a test technique based on ASME BPVC vacuum box testing—confirm quality of RF welds before the shield envelope is complete. We developed this method for testing the Navy’s Advanced System Integration Lab (ASIL) chamber at Patuxent River, shaving weeks off the construction/testing schedule.
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Custom Environmental Test Chambers
Does your environmental testing conditions have special requirements, or are you unsure of the right product for you? Tenney and Lunaire Environmental offer custom environmental test chambers - including custom climate chambers and custom vacuum chambers. The experienced Tenney and Lunaire team can provide customizations to their climatic chamber models based on client needs. Contact the sales team today to discuss you specific testing requirements.
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Atomic Force Microscope for SEM/FIB
AFSEM® AFM Insert
AFSEM is an atomic force microscope (AFM), designed for integration in a SEM or Dualbeam (SEM/FIB) microscope. Its open access design allows you to simultaneously operate SEM and AFM inside the SEM vacuum chamber. The correlated image data of AFM and SEM enable unique characterization of your sample, and the combination of complementary techniques is a key success factor for gaining new insights into the micro and nano worlds. AFSEM enables you to easily combine two of the most powerful analysis techniques to greatly extend your correlative microscopy and analysis possibilities.
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Scanning Electron Microscopy
SEM
Materials Evaluation and Engineering
JEOL JSM-6610 LV LaboratoryScanning electron microscopy (SEM) uses electrons for imaging to obtain higher magnifications and greater depth of field than light microscopes. The instruments at MEE are capable of variable-pressure, or low vacuum, SEM (VPSEM), as well as traditional high-vacuum conditions for sample observation. VPSEM is a specialized method using a variable-pressure sample chamber that allows direct evaluation of samples that are not readily examined with a traditional high-vacuum SEM. Nonconductive or vacuum sensitive samples that would typically require additional sample preparation can be directly analyzed in VPSEM without the need for additional sample preparation, such as carbon or metallic conductive coatings. This reduces both sample preparation time and distractions in microanalysis. Our laboratory also has a field emission SEM (FESEM) for critical high-magnification work and low-voltage (LVSEM) applications. Each instrument has a spacious sample chamber that can accommodate large and irregularly-shaped specimens and accessories for feature dimensional analysis and chemical microanalysis.
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Thermal Vacuum Chamber & Control
Based on several successful deliveries of complex DAQ systems, WinSoft was selected by 2 major satellite manufacturers to design and build a DAQ and Control systems which are connected to various thermal vacuum chambers - all connected to a central database.The chambers are used for environmental testing. The data collected by the DAQ system is recorded continuously every few seconds over a period of a few months.
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Space Simulators
A6H Series
Bemco offers up-to-date space simulators incorporating all of the preferred features needed for reliable combined temperature and high vacuum testing. The A6H series includes a fully integrated and appropriately sized PCL-III Portable Liquid Chiller utilizing liquid nitrogen for cooling. The PCL-III is mounted within the A6H system structure and permanently attached to the chamber thermal shroud. Mechanical cooling is available as an option.
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Altitude and Vacuum Chambers
A series
Bemco's acclaimed Altitude and Vacuum Chambers are designed to meet the need for a combination, easy to use altitude testing chamber, and ruggedly built vacuum processing facility. Today's modern A series chambers feature another Bemco first, a standard Brooks Automation, Granville-Phillips Series 375 Convectron Gauge Controller.
