Product

Pressure Sensors

ESCP-SAPT Transmitter

-

ES Systems

ESCP-SAPT Transmitter - ES Systems

ESCP-SAPT pressure transmitters consist of a MEMS capacitive pressure sensor die, which is underpinned by ES’ innovative microfabrication process that has been proven suitable for the mechanical, radiation and temperature environment of space applications. The full custom, radiation-hardened signal conditioning IC was designed entirely by ES, utilizing a standard deep submicron CMOS process of a European foundry.

Product

Silicon-Microphone 8Ch Auto Test System

BK9015

-

BaKo Co., Ltd

BK9015 - BaKo Co., Ltd

Based on the BK3011 MEMS Mic Tester, the BK9015 is our fully automatic 8 channel MEMS (Silicon) mic sweep tester. Testing up to 8 DUT's simultaneously, the BK9015 can test 8 mics simultaneously and sort them according to passing grade and cause of failure! Because it uses a sweep test, it can check characteristics for the entire frequency range. Your data can be viewed in real time or stored so you can analyze problems or trends.

Product

Custom Aluminum Nitride Ceramic Substrate

CAN1

-

PotentioLab

CAN1 - PotentioLab

CAN1 Custom Aluminum Nitride Ceramic Substrate is a custom aluminum nitride ceramic substrate for sensor platforms, MEMS devices, thermal management studies, thin-film deposition, and electronic materials research. The substrate can be supplied for prototype development, coating trials, and small-batch R&D projects where stable ceramic material and custom dimensions are required.

Product

Vibration Sensors

FastTracer

-

ROGA-Instruments

FastTracer - ROGA-Instruments

FastTracer is an innovative vibration analysis solution. Using MEMS technology, Sequoia IT incorporates directly into sensors triaxial sensor technology and the capability of analog to digital conversion. Vibration data is exported directly to the computer via a standard USB port, turning it thanks to application software, into a simple but complete vibration analyzer that is highly suitable for preventive machine maintenance, vibration diagnostics, and R&D operations.

Product

Accelerometers - Special Purpose

-

Analog Devices Inc.

Analog Devices Inc.

Analog Devices accelerometers and iSensor® MEMS accelerometer subsystems provide accurate detection while measuring acceleration, tilt, shock, and vibration in performance driven application. Our portfolio leads the industry in power, noise, bandwidth, and temperature specifications, and offers a range of MEMS sensor and signal conditioning integration on chip. Our MEMS-based Circuits from the Lab® reference designs have been built and tested by ADI experts to help you jumpstart your next system design.

Product

Mass Flow Controllers for Gases

-

Sensirion AG

Sensirion AG

Sensirion''s mass flow controllers are characterized by fast and accurate control of gas flow over a wide dynamic range. Based on the innovative CMOSens Technology, the heart of these mass flow controllers is a calorimetric microsensor (MEMS), which is integrated with the complete signal conditioning electronics on one single chip. While the flow is measured using the thermal measurement principle, efficient control is provided by an analog controlling circuit. This unique integrated technological approach results in excellent performance and reliability - at a very attractive cost.

Product

Two And Three Axis Gyroscopes

TAG

-

Inertial Labs, Inc.

TAG - Inertial Labs, Inc.

The Inertial Labs Axis Gyroscopes are developed for Electro-Optical Systems, Gimbals, Line-of-Sight, and Pan and Tilt Platforms for inertial stabilization and pointing applications. These devices utilize advanced, tactical-grade MEMS sensitivity whose size, power consumption, reliability, and performance are ideal for accomplishing complex tasks requiring accurately stabilizing assorted platforms.

Product

Compact Ultrafast 50-50,000 sccm Mass Flow Controller/Meter

C-Series

-

MKS Instruments

C-Series - MKS Instruments

The C-Series Mass Flow Controller (MFC) is a compact, fast-response model using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. It is available in Full Scale flow rates from 50 sccm to 50 slm (N2 equivalent) with a control range from as low as 0.1% of Full Scale up to 100% of Full Scale and is also available as a flow meter. Analog (0 to 5 VDC) or digital (RS485 or Modbus TCP/IP) communications interfaces are available. Required power supply voltage is 24 VDC nominal.

Product

Wafer Bonder

AML

-

OAI

AML - OAI

Wafer bonding has found many applications in the field of MST, MEMS and micro engineering. These include the fabrication of pressure sensors, accelerometers, micro-pumps and other fluid handling devices. The process is also used for first-order packaging of silicon microstructures to isolate package-induced stresses. The OAI AML Wafer Bonder facilitates both the alignment and bonding to be performed in-situ, in a high vacuum chamber. For anodic bonding the wafers are loaded cold and heated in the process chamber. For high accuracy alignment the wafers are aligned and brought into contact only after the process temperature has been reached, thus avoiding differential thermal expansion effects which can compromise alignment. The AML Wafer Bonder is excellent for anodic bonding, silicon direct and thermal compression bonding applications. These features enable the bonder to be used with virtually any processing tool.

Product

MEMS Tunable Filter

-

Optoplex Corporation

Optoplex Corporation

Optoplex’s MEMS Tunable Optical Filter is based on a patented micro-optic design with MEMS tuning technology. It is an integrated module consisting of a MEMS chip, micro-optics and control electronics and interface. When receiving a stream of optical signals of a plurality of wavelengths from the Input-Port (IN), the 2-port tunable optical filter directs a selected channel to the Output-Port (OUT). Wavelength (frequency) tuning is achieved by changing driving voltage applied to the MEMS chip, via the control electronics and the built-in firmware.