Ion Sources
Veeco offers the most comprehensive array of ion beam sources for a broad range of applications, including the industry's only Linear gridded sources.
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Gridded DC Ion Sources
Ion-assisted processes like sputtering, etching, and surface treatment depend on a beam that’s stable, uniform, and tightly controlled. Gridded DC ion sources make that happen, giving engineers the precision they need to fine-tune ion energy and current density for reliable results.
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Gridless End-Hall Ion Sources
Veeco's Gridless End Hall Ion Sources provide high beam current for vacuum coating processes.
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Gridded RF Ion Sources
Veeco's gridded RF ion sources are designed for improved production of long-run ion beam deposition processes.
