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SOI Bonding Systems
An accurate wafer bonding process is the key factor in obtaining high quality single crystalline silicon films on insulating substrates. The EVG850 SOI/Direct Wafer Bonding systems are designed to fulfill a wide range of fusion/molecular wafer bonding applications, with main focus on SOI substrates manufacturing. Ultra clean handling of wafers throughout the bonding process assures high-yield and void-free bonds. All essential steps, from cleaning and alignment to pre-bonding and IR-inspection are combined in one high volume production system. EVG850 is the only production bonding system built to operate in high throughput, high-yield environments and guarantees void-free SOI wafers up to 300 mm.The EVG300 series single wafer cleaning systems are designed for efficient removal of particles. In semiconductor processing, efficient cleaning and particles removal prior to critical process steps enables maximum yield. Wafer Bonding is a process which is strongly affected by particles: each particle on the wafer surface produces a void orders of magnitude larger than its diameter, contributing to a dramatic yield loss.
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Wafer Bonder
AML
Wafer bonding has found many applications in the field of MST, MEMS and micro engineering. These include the fabrication of pressure sensors, accelerometers, micro-pumps and other fluid handling devices. The process is also used for first-order packaging of silicon microstructures to isolate package-induced stresses. The OAI AML Wafer Bonder facilitates both the alignment and bonding to be performed in-situ, in a high vacuum chamber. For anodic bonding the wafers are loaded cold and heated in the process chamber. For high accuracy alignment the wafers are aligned and brought into contact only after the process temperature has been reached, thus avoiding differential thermal expansion effects which can compromise alignment. The AML Wafer Bonder is excellent for anodic bonding, silicon direct and thermal compression bonding applications. These features enable the bonder to be used with virtually any processing tool.
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Plane Mirror Interferometer
10706A
The Keysight 10706A Plane Mirror Interferometer is a dual pass interferometer used for multiple axis applications such as X-Y stages where the measurement mirror may move perpendicular to the measurement axis. The unique contribution of the 10706A is its tolerance of angular misalignment of the plane mirror reflector. The 10706A can accept a range of measurement mirror angular alignment changes.
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Multipurpose X-Ray Diffractometer with Built-In Intelligent Guidance
SmartLab SE
The SmartLab® SE is a highly versatile multipurpose X-ray diffractometer with built-in intelligent guidance. It offers continued refinement of the original ease of use features that enabled the original SmartLab to receive the R&D 100 Award in 2006: automatic alignment, component recognition, cross beam optics and advanced photon counting hybrid pixel array detectors (HPAD).
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ADAS Tools
This 12.7-inch wireless touchscreen tablet comes replete with all the functionality expected in an advanced diagnostic and service tablet including the ability read and erase codes, view Freeze Frame and view and graph Live Data, perform Active Tests and perform coding and adaptions, plus it includes ADAS calibration and Wheel Alignment software.
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Wind Power Solution
ECO GE
The ECO GE is custom-made with firmware and fixtures designed specifically for GE 1.5x and 2.5x. These precisely designed fixtures make generator-to-gearbox alignment easy inside any nacelle – safeguarding reliability and optimizing the energy efficiency of the wind turbine.
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TIRE TREAD DEPTH GAUGE ACCESSORY
MDMAXTPMSTTD
*Add-on accessory that allows technician to measure tire tread depth with high accuracy when checking TPMS sensors*In one simple gesture, it can detect worn tires, tire damage and indicate poor alignment with tread depth trigger activation button*Provides a quick vehicle safety check, quickly captures 3 tire measurements (inner, center, outer)
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Automated Measurement System
EVG®40NT
The EVG40 NT (stand-alone tool) and the AVM (HVM-integrated module) enable measurement of lithography relevant parameters like critical dimension, as well as bond alignment accuracy.Because of the high-measurement accuracy, it is possible to verify compliance to tight process specifications and instantly optimize integrated process parameters.
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Calibration Equipment
Calibration is the method of comparing tools and measuring devices to higher accuracy standards. Torque calibration equipment is the official means by which torque testers and sensors are calibrated and are traceable to National or International Standards, such as N.I.S.T and ISO. In order to maintain precision accuracy, it is essential that torque measuring equipment be calibrated regularly. By equipping your team with Mountz calibration equipment, you can avoid the costly chore of sending your torque tools to the lab whenever they fall out of alignment.
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50 KN Capstan Grips For Rope
These 50 kN (11,000 lbf) capstan grips are designed specifically for testing the tensile properties of rope with a diameter between 8 and 28 mm (0.31 and 1.1 in). The upper and lower grips incorporate an easy-to-load split drum and the upper grip has a counterweight attached to maintain alignment of the grips with the axis of the universal tester during testing.
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Soft Board Dedicated Automatic Testing Machine
U800FPC
1. CCD automatic alignment, with an accuracy of ± 10μm2. Support layout test, displacement function3. The upper and lower jigs X, Y, θ are automatically fine-tuned to improve the yield4. Soft board stretching function5. Automatic marking function6. Support SHOPFLOOR report output7. Optional BARCODE READER
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Digital Transmitter
CA-320A
The CA-320A Digital Transmitter and CA-320B Receiver comprise the exciting new Compass Correction System. This is the first system that does not need an external heading reference for the for the alignment of the compass.
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Motor Vehicle Headlight Testers
Foshan Analytical Instrument Co, Ltd.
It can be used to promptly and accurately measure the luminous intensity and the illuminating position(or the optical axis deviation amount) of the high/low beam of vehicle headlight. With the lamp image alignment techique the single-machine high/low beam testing needs only 30-odd seconds.It is also used for the dual-lamp test at the testing station,the dual-machine test at the same time needs only 20-odd seconds.
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Modular Mounts
M-SWITCH
The M-Switch series of adjustable, modular mounts are designed to redirect a horizontal interferometric set-up to a vertical one. This vertical orientation can help reduce distortion effects commonly found from clamping, and reduce alignment time. There are 4 primary versions of hardware designed to enable testing of mirrors, windows, lenses and lens assemblies. Holding of the part under test can be done with a variable 3 arm mount (for flexibility) or our kinematic mount (for high volume). Reference mirrors can be supplied with a variety of flatness and coating specifications to match your application needs.
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Dynamic Laser Interferometer
DynaFiz
Purpose built for reliable interferometry in vibration-prone environments; versatile and flexible enough to address a wide range of application needs from high-end telescope testing to live phase feedback for active alignment of optical systems.
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Scanning Slit Beam Profilers
DataRay manufactures two types of scanning slit beam profilers: the patented BeamMap series, which offers real-time M², divergence, focus and alignment management, and the Beam’R series which provides affordable, compact, and precise beam profiling. All of our scanning slit beam profilers are available with Si, Ge, and InGaAs detectors, covering wavelengths from 190 nm to 2500 nm.
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Digital Test Instrumentation
EDigital-Series™
Teradyne’s eDigital IVI driver controls all parallel digital functional test parameters, including per-pin timing, data formats, pattern data, and timing alignment on 64 channels (32 static + 32 dynamic or 32 differential)—each with an 8M pattern depth and results memory.
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Wind Power Solution
EVO ACCIONA
The EVO ACCIONA is custom-made with firmware and fixtures designed specifically for Acciona turbines. These precisely designed fixtures make generator-to-gearbox alignment easy inside any nacelle – safeguarding reliability and optimizing the energy efficiency of the wind turbine.
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Indicators - Dial
Used for precise comparisons or measurements of workpiece surfaces, machine, equipment, part tolerances, alignment.
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Machine Vision Computers
AIIS Series
Advantech AIIS Series are closely aligned with Machine Automation applications such as Automated Optical Inspection (AOI), Wafer Inspection, and alignment inspection which heavily rely on machine vision.
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CCD Foundry Services
Teledyne DALSA Semiconductor’s 150mm CCD process offers surface or buried channel operation at up to 15V with two or three layers of polysilicon and one, two or three layers of metal. A modular processing approach allows our foundry customers to adjust process parameters to meet the most demanding requirements for CTE (>99.999%), charge storage capacity, and dark current (<1nA/cm2). The base process uses 1X projection lithography with 2.5µm design rules, allowing die sizes of up to 100mm X 100mm. Where required, tighter alignment tolerances and smaller feature sizes can be obtained by using 5X lithography, using a mix and match or all-stepper approach. The maximum die size attainable with the stepper is 22mm X 22mm, but larger sensors can be fabricated using stitching.
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Plane Mirror Reflector
10724A
The Keysight 10724A reflector is used with the Keysight 10706A, 10706B, 10715A and 10716A interferometers for single-axis measurements. It can also be used with the Keysight 10737L/R Compact Three-Axis Interferometers. Alignment hardware is included.
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KMD540 Series and RDR2000/2100 Panel
TA-3C
The TA-3C test fixture is a combination of the KMD540 testing requirements and the RDR-2000/2100 weather radar interface requirements. This panel allows the technician to test the KMD540 MFD as a stand alone item (with external simulators) or together with a radar sensor for a dynamic real time test. The panel includes the required switching for sensor alignment and KMD testing along with input jacks for the required data inputs. Also built into the fixture is an analog gyro simulator for checking the stabilization functions of the sensor. The full enclosure comes in standard panel width.
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Radar Systems / Millimeter Wave Radar / Micro Wave Radar
KEYCOM develops various radars for versatile applications based on its knowledge and expertise on millimeter wave and microwave technologies. KEYCOM’s product line of radars includes Radar Test Systems (RTS) to evaluate distance accuracy or output, Radar Alignment Systems (RAS) to help you adjust the alignment of radars, and Radar Cross Section (RCS) measurement systems to measure RCS of such radar targets as aircraft, ships and automobiles.
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Audio Test Software
1. Distortion free stimulus even the equalized stimulus.2. Unlimited channels acquisition and processing. (Hardware limited)3. Human correlated listening test(Bark Scale intensity chart). (Requires large memory)4. Hi Res intensity chart for buzz/pop detection. (Requires large memory)5. Auto equalization method with target dBSPL accuracy.6. TCP client for test framework integration.7. Easy limits and logs development.8. Easy logs visualization module.9. Auto waveform alignment and triggering.(Upto single point alignment accuracy)10. Easy regression testing via TCP client.11. Standard Magnitude, Phase, THD, THD+N, Rubb&Buzz, Pink Noise, Noise Tests.12. Unlimited calibrations and equalization for scaling to different products and stations.13. Lowest test system and test sequence development times.14. Requires minimal training and debugging.15. Automatically avoid Reference speaker play and stop pops.16. WMD/ASIO driver compatible sound cards supported.(B&K 3670 recommended)
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Fully Automatic Test Machine for Ceramic Substrates
U800CCT
1. CCD automatic alignment, with an accuracy of ± 10μm2. Support layout test, displacement function3. The upper and lower jigs X, Y, θ are automatically fine-tuned to improve the yield4. Automatic loading and unloading of magazine5. Automatic bad marking and verification of scratches
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Platforms
Platform solutions offer all the benefits of VPC rack panel solutions plus a platform for ITA fixtures. This platform allows easier engagement, proper alignment, and takes up minimal space.
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Metrology
KLA’s metrology systems address a range of chip and substrate manufacturing applications, including verification of design manufacturability, new process characterization and high volume manufacturing process monitoring. By providing precise measurement of pattern dimensions, film thicknesses, layer-to-layer alignment, pattern placement, surface topography and electro-optical properties, our comprehensive set of metrology systems allows chip manufacturers to maintain tight control of their processes for improved device performance and yield.
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Goniophotometers
Instrument Systems Optische Messtechnik GmbH
All goniophotometers are designed as Type C with a horizontal alignment of the optical axis (turning luminaire configuration). Each goniometer sets benchmarks in its class for precision, reliability and handling. If these goniophotometers are combined with a spectroradiometer from Instrument Systems, they are able to determine not only photometric data but also spectral quantities, such as color coordinates, color temperature, and even color rendering index as a function of angle.
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Bi-Directional Alignment Laser
LA-01MB-AK
These bi-directional alignment lasers allow Quick & Easy adjustment of optical experiments and optical sets.
