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Plasma Generators
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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In Situ Diagnostics
For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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Remote Plasma Sources
Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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High Power Microwave Plasma System
The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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PXI-5422, 80 MHz Bandwidth, 16-Bit PXI Waveform Generator
779087-02
80 MHz Bandwidth, 16-Bit PXI Waveform Generator - The PXI‑5422 is a 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5422 also features advanced synchronization and data streaming capabilities.
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VXI Quad Sine Cosine Generator
VX2701
Low distortion sine and cosine generationFrequency bandwidth up to 100kHzProgrammable phase ± 180 ° (0.1 ° resolution)Precise sine zero crossing trigger output with selectable delayProgrammable DC offset ± 10VProgrammable output voltage ± 10V p
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Four Channel Arbitrary Waveform Generator 1.25GS/s 16Bit 1GS Mem 4CH 4 Markers AWG
P1284M
The Proteus P1284M, is a PXIe based, 1.25GS/s, four channel arbitrary waveform generator offering technologically advanced options and configurations such as, a dual channel 2.7GS/s digitizer with 9GHz bandwidth, to transform the instrument to an arbitrary waveform transceiver. The P1284M offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Arbitrary Waveform Generator
VX2026
The VX2026 is a high speed (40MS/s), 14Bit, Arbitrary Waveform Generator for high performance testing. Built-in functions for pre-defined waveforms (sine, square, triangle, sawtooth) are available via software driver. Arbitrary waveforms will be loaded via data files into the on-board memory.
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PXIe-5442, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 512 MB, PXI Waveform Generator
780109-03
PXIe, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 512 MB, PXI Waveform Generator—The PXIe‑5442 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms, standard functions including sine, square, triangle, and ramp, as well as signals that require onboard signal processing. Some of these signal processing operations include FIR and CIC interpolation filters, digtal prefilter gain, numerically-controlled oscillator, and I/Q mixing for quadrature digital upcoversion. The PXIe‑5442 also features advanced synchronization and data streaming capabilities.
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PCI-5421, 100 MS/s, 16-Bit Waveform Generator Device
778692-02
The PCI‑5421 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PCI‑5421 also features advanced synchronization and data streaming capabilities.
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12GHz Single Channel Signal Generator 19" 1U Rack Module
LS1291R
The LS1291R, 12GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. The LS1291R features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS1291R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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PXI-5422, 80 MHz Bandwidth, 16-Bit PXI Waveform Generator
779087-01
80 MHz Bandwidth, 16-Bit PXI Waveform Generator - The PXI‑5422 is a 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5422 also features advanced synchronization and data streaming capabilities.
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3GHz Single Channel Signal Generator
LS3081B
The LS3081B is a 3GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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6GHz Single Channel Signal Generator 19" 1U Rack Module
LS6081R
The LS6081R, 6GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. The LS6081R features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6081R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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2-Channel Arbitrary Waveform Generator
3156C
Racal Instruments™ 3156C Dual Channel Arbitrary Waveform Generator outputs 16-bit waveforms from 2 channels at up to 225 MS/s. 12-bit digital patterns may be output at rates up to 200 Mbits/s.
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NI-5742, 16-Bit, 1 MS/s, 32-Channel Signal Generator Adapter Module for FlexRIO
782865-01
The NI‑5742 provides simultaneously sampled analog output channels for signal generation. It also features single-ended, DC-coupled inputs and general-purpose digital input and output lines for system stimulus and control. The NI‑5742 is ideal for applications requiring high-channel density and the power of a user-programmable FPGA. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the NI‑5742, you must pair it with a compatible PXI FPGA Module for FlexRIO.
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16 Bit Waveform Generator
PA72G16400
The PA72G16400 is a 16-bit arbitrary waveform generator, capable of generating waveforms at speeds up to 400Msps. The high resolution and the high sample rate allows generating signals with very low quantization noise levels. An onboard offset voltage source allows generating offset signals while maintaining optimal utilization of the DAC’s digital range. With the 8MWord of memory, there is lots of room for uploading several different patterns, allowing switching patterns with minimal bus communication.
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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PXIe Vector Modulator
M9316A
The M9316A PXIe Vector Modulator is a 3-slot module with integrated wideband IQ modulator and arbitrary waveform generator (AWG) designed to work with the M9383A PXIe Microwave Signal Generator. When ordered with M9383A, it can support 1MHz to 20 GHz frequency coverage, up to 160 MHz RF bandwidth, and up to 1 Giga-sample of AWG playback memory. (See M9383A PXIe Microwave Signal Generator options.
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PXIe-5423, 40 MHz Bandwidth, 2-Channel, 16-Bit PXI Waveform Generator
785116-01
PXIe, 40 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXIe-5423 is a 40 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5423 also features advanced synchronization and generation features like waveform scripting and streaming.
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125MS/s PXIBus Arbitrary Waveform Generator
5201
Model 5201 is a Single-Channel Arbitrary Waveform / Function Generator that combines many powerful functions in one small package. Supplied free with the instrument is ArbConnection software, which is used for controlling the 5201 and for generating, editing and downloading waveforms from a remote computer.
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50MS/s PCIBus Arbitrary Waveform Generator
5325
Model 5325 is a Single-Channel Arbitrary Waveform Generator that combines many powerful functions in one small package. Supplied free with the instrument is ArbConnection software, which is used for controlling the 5325 and for generating, editing and downloading waveforms from a remote computer.
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40GHz Dual Channel MW Signal Generator 19" 1U Rack
LSX4092R
The LSX4092R is a 40GHz Dual Channel Microwave Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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PXI-5421, 43 MHz Bandwidth, 16-Bit PXI Waveform Generator
778697-03
43 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXI‑5421 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5421 also features advanced synchronization and data streaming capabilities.
