Plasma Generators
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RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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PXI Three Channel Function Generator
41-620-003
Function Generator
The 41-620 is a compact 3 channel function generator provided in a PXI 3U single slot module. It is capable of generating sine waves to 10MHz with 48-bit frequency resolution referenced to the 10MHz PXI clock or to an external standard. The 41-620 can generate arbitrary waveforms loaded into the internal 256k memory, allowing the function generator to emulate many waveform types, including the typical waveforms of automotive and aerospace sensors.
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3GHz Dual Channel Signal Generator 19" 1U Rack Module
LS3082R
Signal Generator
The LS3082R, 3GHz dual channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” space efficient, rack-mounted box. The LS3082R features two phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS3082R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Product
PCI-5412, 100 MS/s, 14-Bit Waveform Generator Device
779177-01
Waveform Generator
The PCI‑5412 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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USB Modular Function Generator
U2761A
Waveform Generator
Keysight U2761A is a 20 MHz function generator that offers 10 standard waveforms plus pulse and arbitrary waveforms generation capabilities.
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PXIe-5433, 80 MHz Bandwidth, 2-Channel, 16-Bit PXI Waveform Generator
785118-01
Waveform Generator
The PXIe-5433 is an 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5433 also features advanced synchronization and generation features like waveform scripting and streaming.
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PXI-5651, 3.3 GHz RF Signal Generator
779670-01
Signal Generator
3.3 GHz PXI RF Analog Signal Generator—The PXI‑5651 features continuous-wave generation capabilities with FM, 2‑FSK, or OOK modulation. It uses direct digital synthesis (DDS) for high-resolution frequency hopping or phase-continuous sweeping for fixture and device characterization applications. The PXI‑5651 is ideal for clocking nonstandard sample rates, such as WCDMA signals at baseband or intermediate frequency (IF). With these versatile signal generators, you can perform analog and digital modulation through the onboard DDS circuit, which gives you frequency modulation and frequency-shift keying for applications such as bit error rate test, antenna testing, or even keyless entry. You can also perform amplitude modulation using on-off keying.
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3GHz Single Channel Signal Generator 19" 1U Rack Module
LS3081R
Signal Generator
The LS3081R, 3GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. The LS3081R features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS3081R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Comb Generator, 10 MHz to 50 GHz
U9391F
Comb Generator
The Keysight Technologies, Inc. U9391F comb generators were developed to provide precision phase calibration, for non-linear measurements using the PNA-X nonlinear vector network analyser (NVNA), referenced to the National Institute of Standards and Technology (NIST) standard. Additionally, the comb generators can be used to calibrate PNA and PNA-X network analyzers for phase and delay measurements of frequency converters without requiring reference or calibration mixers.
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Waveform Generator, 20 MHz, 2-Channel
33510B
Waveform Generator
The 33510B waveform generator provides Keysight’s exclusive Trueform technology which offers unmatched capabilities for generating a full range of signals for your most demanding measurements.
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Arbitrary Waveform Generator PCI Card
GC1300
Waveform Generator
The GC1300 is a single-channel PCI-based Arbitrary Waveform Generator. It is a high performance waveform generator that combines many powerful functions in one small package. Supplied free with the instrument is Arbconnection software, which is used for controlling the GC1300 and for generating, editing and downloading waveforms from a remote computer.
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Dual/Quad 125 MS/s VXI Arbitrary Waveform Generator
3164
Waveform Generator
The Racal Instruments™ 3164 Series is a single-wide VXIbus Module. The 3164-2 has two 14-bit Arbitrary Waveform Generator (AWG) channels that operate independently, and the 3164-4 AWG has four channels. The maximumsample rate for each channel is 125 MS/s. All waveforms can be sampled from data previously loaded into waveform memory or loaded and output on the fly.
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PXI-5422, 80 MHz Bandwidth, 16-Bit PXI Waveform Generator
779087-01
Waveform Generator
80 MHz Bandwidth, 16-Bit PXI Waveform Generator - The PXI‑5422 is a 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5422 also features advanced synchronization and data streaming capabilities.
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PXI-5421, 43 MHz Bandwidth, 16-Bit PXI Waveform Generator
778697-03
Waveform Generator
43 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXI‑5421 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5421 also features advanced synchronization and data streaming capabilities.
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PXIe Multi-Channel Function Generator Module, 8-Channel
43-625-004
Function Generator
The 41-625-004 (PXI) and 43-625-004 (PXIe) are function generator modules that provide 8 channels in a single PXI/PXIe slot. They can generate sine waves to 300 kHz with 5.76 mHz frequency resolution referenced to the 10 MHz PXI clock. The output voltage range is up to +/-25 V in a 16-bit resolution. It also support PXI trigger functions allowing events from other instruments to initiate waveform generation or sweeps.
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Arbitrary Function Generator 14-bit, 100Msa/s
PXI-5412
Function Generator
The PXI-5412 is a 20MHz arbitrary waveform generator for generating custom arbitrary waveforms and other standard functions such as sine, square, triangle, and ramp. The arbitrary generator generates signals from -6 V to +6 V and uses direct digital synthesis (DDS) to generate precise waveforms.
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Comb Generator, 10 MHz to 67 GHz
U9391G
Comb Generator
The Keysight Technologies, Inc. U9391G comb generators were developed to provide precision phase calibration, for non-linear measurements using the PNA-X nonlinear vector network analyser (NVNA), referenced to the National Institute of Standards and Technology (NIST) standard. Additionally, the comb generators can be used to calibrate PNA and PNA-X network analyzers for phase and delay measurements of frequency converters without requiring reference or calibration mixers.
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Arbitrary Function Generator PXI Card
GX1200/GX1201
Waveform Generator
The GX1200 and GX1201 are high performance, single-channel PXI arbitrary waveform generators that combine a function generator, arbitrary waveform synthesizer, programmable sequencer, pulse generator, and modulation generator in one instrument. The GX1200 Series delivers all this at a lower cost than comparable benchtop or VXI-based instruments.
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Waveform Generator, 120 MHz, 1-Channel
33621A
Waveform Generator
Keysight 33600A Series waveform generators with exclusive Trueform signal generation technology offer more capability, fidelity and flexibility than previous generation DDS generators. Easily generate the full range of signals you need to your devices with confidence the signal generator is outputting the signals you expect.
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Clock Generator Module
M8008A
Clock Generator
The M8008A is designed as sample clock source for the M8199A 128/256 GSa/s Arbitrary Waveform Generator. It can also be used as a standalone low-jitter clock source for other applications. It comes as a 1-slot AXIe module, which allows the M8008A plus up to two M8199A AWG modules to be plugged into a single 5-slot AXIe chassis.
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50MS/s Four-Channel Arbitrary Waveform Generator
WW5064
Waveform Generator
The WW5064 offer a 50 MS/s four-channel universal waveform synthesizer. Each is built in a small case size to save space and cost but without compromising bandwidth and signal integrity. The instrument outputs either standard or user-defined waveforms in the range of 100µHz and up to 25MHz.
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200 MS/s Waveform Generator & Dual 50 MHz Pulse/ Timing Generator
3172
Pulse Generator
The Racal Instruments™ 3172, a 200 MS/s Waveform Generator and Dual 50 MHz Pulse and Timing Generator, combines multi-instrument density and highfrequency performance in a single-slot, C-sized VXIbus format.Waveform output in the range of 100 μHz to 30 MHz with 16-bit vertical resolution (12-bit vertical for 3171 emulation) and pulse output to 50 MHz make the 3172 a powerful solution to a variety of test stimulus requirements.
