Plasma Generators
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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PXI Function Generator
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Our PXI Function Generator is capable of generating sine, square and triangle waveforms to 10MHz with 48-bit frequency resolution referenced to the 10MHz PXI clock or to an external standard. It can generate fast swept frequency signals, permitting the output to emulate the operation of variable speed devices. The module can also generate arbitrary waveforms loaded into its internal 256k memory, allowing the emulation of many waveform types including the typical waveforms of automotive and aerospace sensors.
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50MS/s PCIBus Arbitrary Waveform Generator
5325
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Model 5325 is a Single-Channel Arbitrary Waveform Generator that combines many powerful functions in one small package. Supplied free with the instrument is ArbConnection software, which is used for controlling the 5325 and for generating, editing and downloading waveforms from a remote computer.
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Product
12GHz Four Channel Signal Generator
LS1294B
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The LS1294B is a 12GHz Four Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Product
9GS/s 16Bit 8GS Mem 8CH 16 Markers RF AWG Benchtop
P9488B
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The benchtop version of the Proteus arbitrary waveform generator series offers up to 12 channels in a 4U, 19” benchtop box. With a 9” touch display and on-board PC the benchtop platform enables users to program the instrument without the need of an external PC. Users can program the instrument from the onboard PC using various programming environments such as MATLAB, LabView, Python, and more. So for synchronized, phase coherent, multi-channel applications such as quantum physics and radar applications the Proteus arbitrary waveform transceiver is an ideal, high performance, and cost effective solution.
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Waveform Generator, 20 MHz, 1 Channel
EDU33211A
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The EDU33211A single channel function / arbitrary waveform generator brings uncompromising performance to an entry-level function generator.
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PXI-5422, 80 MHz Bandwidth, 16-Bit PXI Waveform Generator
779087-01
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80 MHz Bandwidth, 16-Bit PXI Waveform Generator - The PXI‑5422 is a 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5422 also features advanced synchronization and data streaming capabilities.
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9GS/s 16Bit 8GS Mem 12CH 8 Markers RF AWG Desktop
P94812D
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The desktop version of the Proteus arbitrary waveform generator series offers up to 12 channels in a 4U, half 19” dedicated chassis. The compact form size and small footprint save valuable bench space. So for synchronized, phase coherent, multi-channel applications such as quantum physics and radar applications the Proteus arbitrary waveform transceiver is an ideal, space efficient, and cost effective solution.
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PXIe CW Source, 1 MHz to 3 GHz or 6 GHz
M9380A
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Save floor space with a compact, modular analog signal generator Provides Keysight quality and performance for local oscillator (LO) substitution, interference and component test Minimize need for external amplification with output power of +18 dBm across the frequency range Reduce test time with easy integration into your high-speed automated test system
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Video Pattern Signal Generator
Model A223800/01/02/03/04
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Support 8K Super Hi-Vision (7680x4320/8192x4320)Independent graphics core for 8K Super Hi-Vision pattern with less than 200 msec. switch timeUp to 4 signal modules per unitUp to 4 resolution and pattern outputs.7 inch 1024x 600 high-resolution touch panel, GUI interfaceBMP file format supportUSB 3.0 data accessGigabit Ethernet high-speed network interfaceHDMI 2.0a signal module (Optional) - 8K x 4K 60 Hz (4 HDMI port) - 4K x 2K 60 Hz (1 HDMI port) - Pixel rate up to 600MHz (6Gbps TMDS rate) - RGB 4:4:4 / YCbCr 4:4:4 or 4:2:2 or 4:2:0 - HDCP 2.2 / 1.4 - Wide color gamut (ITU-R BT.2020/DCI-P3) - HDR (High Dynamic Range) Testing (HDR infoframe & metadata / EOTF) - SCDC (status & control data channel) Reader
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Waveform Generator, 80 MHz, 1-Channel
33611A
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Keysight 33600A Series waveform generators with exclusive Trueform signal generation technology offer more capability, fidelity, and flexibility than previous generation DDS generators. Easily generate the full range of signals you need with confidence that the signal generator is outputting the signals you expect.
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AT-1212, 14-Bit, 1.2 GS/s, 2-Channel Signal Generator Adapter Module for FlexRIO
782248-02
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The AT-1212 provides an analog output channel for signal generation. It also features single-ended, DC-coupled inputs. The AT-1212 is ideal for generating complex signals like digital modulations and RF stimuli for functional and performance tests. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the AT-1212, you must pair it with a compatible PXI FPGA Module for FlexRIO.
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3GHz Four Channel Signal Generator 19" 1U Rack Module
LS3084R
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The LS3084R, 3GHz four channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” space efficient, rack-mounted box. The LS3084R features four phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS3084R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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AT-1120, 14-Bit, 2 GS/s, 2-Channel Signal Generator Adapter Module for FlexRIO
782248-01
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The AT-1120 provides simultaneously sampled analog output channels for signal generation. It also features single-ended, DC-coupled inputs. The AT-1120 is ideal for generating complex signals like digital modulations and RF stimuli for functional and performance tests. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the AT-1120, you must pair it with a compatible PXI FPGA Module for FlexRIO.
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Product
PXI Multi-Channel Function Generator Module, 32-Channel
41-625-001
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The 41-625-001 (PXI) and 43-625-001 (PXIe) are function generator modules that provide 32 channels in a single PXI/PXIe slot. They can generate sine waves to 300 kHz with 5.76 mHz frequency resolution referenced to the 10 MHz PXI clock. The output voltage range is up to +/-25 V in a 16-bit resolution. It also support PXI trigger functions allowing events from other instruments to initiate waveform generation or sweeps.
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Dual Channel Arbitrary Waveform Generator 2.5GS/s 16Bit 1GS Mem 2CH 8 Markers AWG
P2582M
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The Proteus P2582M, is a PXIe based, 2.5GS/s, dual channel arbitrary waveform generator offering technologically. The P2582M offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Waveform Generator, 30 MHz, 2-Channel
33520B
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The 33520B provides Keysight’s exclusive Trueform technology which offers unmatched capabilities for generating a full range of signals for your most demanding measurements.
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Arbitrary Function Generator PXI Card
GX1200/GX1201
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The GX1200 and GX1201 are high performance, single-channel PXI arbitrary waveform generators that combine a function generator, arbitrary waveform synthesizer, programmable sequencer, pulse generator, and modulation generator in one instrument. The GX1200 Series delivers all this at a lower cost than comparable benchtop or VXI-based instruments.
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EXG X-Series Microwave Analog Signal Generator, 9 kHz to 40 GHz
N5173B
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Balance budget & performance to address parametric testing of microwave components & receiversPerform LO up conversion for microwave backhaul links or CW blocking for receiver testingMaximize test throughput with 600-s frequency switchingCharacterize microwave filters & amplifiers with the best combination of output power, low harmonics & full step attenuationUse as a high-stability system reference: the standard high-performance OCXO has an aging rate of 5x10-10 parts/day
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12GHz Dual Channel Signal Generator
LS1292B
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The LS1292B is a 12GHz Dual Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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20GHz Four Channel MW Benchtop Signal Generator
LSX2094B
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The LSX2094B is a 20GHz Four Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Product
20GHz Dual Channel MW Signal Generator 19" 1U Rack
LSX2092R
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The LSX2092R is a 20GHz Dual Channel Microwave Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
