Plasma Generators
-
product
2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
-
product
GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
-
product
RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
-
product
RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
-
product
KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
-
product
Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
-
product
High Power Microwave Plasma System
The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
-
product
In Situ Diagnostics
For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
-
product
Remote Plasma Sources
Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
-
product
13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
-
product
Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
-
product
MXG X-Series Microwave Analog Signal Generator, 9 kHz to 40 GHz
N5183B
Get a fast, compact (2U) alternative to the PSG in the lab, depot or fieldAddress demanding tests of radar modules & systems with near-PSG levels of spectral purityCompensate for system loss & drive high-power amplifiers: +19 dBm output power, -55 dBc harmonics & -68 dBc spurious @ 20 GHzReduce calibration time with switching speed 600 sSimulate narrowband chirps & radar antenna scans with up to five internal function generators that can be used with AM, FM, OM pulse modulation
-
product
AT-1120, 14-Bit, 2 GS/s, 2-Channel Signal Generator Adapter Module for FlexRIO
782248-01
The AT-1120 provides simultaneously sampled analog output channels for signal generation. It also features single-ended, DC-coupled inputs. The AT-1120 is ideal for generating complex signals like digital modulations and RF stimuli for functional and performance tests. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the AT-1120, you must pair it with a compatible PXI FPGA Module for FlexRIO.
-
product
PXI Three Channel Function Generator
41-620-003
The 41-620 is a compact 3 channel function generator provided in a PXI 3U single slot module. It is capable of generating sine waves to 10MHz with 48-bit frequency resolution referenced to the 10MHz PXI clock or to an external standard. The 41-620 can generate arbitrary waveforms loaded into the internal 256k memory, allowing the function generator to emulate many waveform types, including the typical waveforms of automotive and aerospace sensors.
-
product
NI-5742, 16-Bit, 1 MS/s, 32-Channel Signal Generator Adapter Module for FlexRIO
782865-01
The NI‑5742 provides simultaneously sampled analog output channels for signal generation. It also features single-ended, DC-coupled inputs and general-purpose digital input and output lines for system stimulus and control. The NI‑5742 is ideal for applications requiring high-channel density and the power of a user-programmable FPGA. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the NI‑5742, you must pair it with a compatible PXI FPGA Module for FlexRIO.
-
product
40GHz MW Benchtop Signal Generator
LSX4094B
The LSX4094B is a 40GHz Four Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
-
product
40GHz Dual Channel MW Benchtop Signal Generator
LSX4092B
The LSX4092B is a 40GHz Dual Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
-
product
14-Bit AWQ, 2 GSPS Waveform Generator
SDR14TX
The SDR14TX is a dual-channel flexible arbitrary waveform generator (AWG). It offers an outstanding combination of high bandwidth and dynamic range which enables generation of wideband signals.
-
product
6GHz Four Channel Signal Generator
LS6084B
The LS6084B is a 6GHz Four Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
-
product
PXIe-5442, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 256 MB, PXI Waveform Generator
780109-02
PXIe, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 256 MB, PXI Waveform Generator—The PXIe‑5442 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms, standard functions including sine, square, triangle, and ramp, as well as signals that require onboard signal processing. Some of these signal processing operations include FIR and CIC interpolation filters, digtal prefilter gain, numerically-controlled oscillator, and I/Q mixing for quadrature digital upcoversion. The PXIe‑5442 also features advanced synchronization and data streaming capabilities.
-
product
250MS/s PCIBus Arbitrary Waveform Generator
5351
Model 5351, is a single-channel frequency agile waveform synthesizer that combines industry leading performance, frequency agility and modulation capability in a stand-alone, modular product. Having 1.5Hz to 250MHz clock and 16-bit vertical DAC resolution provides the test stimuli required for the decades to come. It can be used as an arbitrary waveform generator, modulating generator, as well as function and pulse generator.
-
product
12GHz 16-Channel Signal Generator 19" 3U Rack Module
LS12916R
The LS12916R, 12GHz 16 channel RF Analog Signal Generator, offers industry leading performance, in a 3U, 19” space efficient, rack-mounted box. The LS12916R features 16 phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. With the highest channel density in the market the LS12916R offer the ideal solution for applications requiring high channel count at minimum space and cost.
-
product
9GS/s 16Bit 8GS Mem 12CH 24 Markers RF AWG Benchtop
P94812B
The benchtop version of the Proteus arbitrary waveform generator series offers up to 12 channels in a 4U, 19” benchtop box. With a 9” touch display and on-board PC the benchtop platform enables users to program the instrument without the need of an external PC. Users can program the instrument from the onboard PC using various programming environments such as MATLAB, LabView, Python, and more. So for synchronized, phase coherent, multi-channel applications such as quantum physics and radar applications the Proteus arbitrary waveform transceiver is an ideal, high performance, and cost effective solution.
-
product
20GHz Dual Channel MW Signal Generator 19" 1U Rack
LSX2092R
The LSX2092R is a 20GHz Dual Channel Microwave Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
-
product
PXI-5421, 43 MHz Bandwidth, 16-Bit PXI Waveform Generator
778697-03
43 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXI‑5421 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5421 also features advanced synchronization and data streaming capabilities.
-
product
Arbitrary Function Generator PXI Card
GX1200/GX1201
The GX1200 and GX1201 are high performance, single-channel PXI arbitrary waveform generators that combine a function generator, arbitrary waveform synthesizer, programmable sequencer, pulse generator, and modulation generator in one instrument. The GX1200 Series delivers all this at a lower cost than comparable benchtop or VXI-based instruments.
-
product
Waveform Generator, 80 MHz, 2-Channel
33612A
With Trueform Series Waveform and Function Generators, you can define any waveform shape and any waveform length using point-by-point arbitrary waveform capability. Anti-aliasing technology ensures your waveforms are exceptionally accurate, and playable at any rate you select. Play signals as defined, at the exact sample rate, without missing short-duration anomalies critical for testing device reliability.
-
product
12GHz Dual Channel Signal Generator
LS1292B
The LS1292B is a 12GHz Dual Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
-
product
20GHz Four Channel MW Benchtop Signal Generator
LSX2094B
The LSX2094B is a 20GHz Four Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
-
product
Waveform Generator, 120 MHz, 1-Channel
33621A
Keysight 33600A Series waveform generators with exclusive Trueform signal generation technology offer more capability, fidelity and flexibility than previous generation DDS generators. Easily generate the full range of signals you need to your devices with confidence the signal generator is outputting the signals you expect.
