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Ozone
Trioxygen
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product
PRIME Ultra Clean, Ultra High Concentration, Ultra High Flow Ozone Generator
SEMOZON® AX8410
The SEMOZON® AX8410 PRIME is the initial product offering in MKS' next generation platform of compact, high concentration, high flow, ultra clean ozone generators. It features a newly designed cell and power structure to achieve twice the ozone output of earlier models with a similar footprint.
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Dissolved Ozone Analyzer
Model 470
Teledyne Advanced Pollution Instrumentation
The Model 470 is a state-of-the-art Dissolved Ozone Sensor designed for semiconductor Wet Bench tools and many other industrial processes. It provides continuous measurement of dissolved ozone in deionized water or sulfuric baths with concentrations up to 150 mg/L. The Model 470 is “clean-ready” for high purity semiconductor processes, and is designed to be simply spliced in-line in the recirculation loop of any wet bench tool with flow rates up to 150 SLPM.
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Ozone Generators & Systems
MKS offers a wide range of ozone generators and modular delivery systems which produce ultra-pure, reliable ozone gas. In the clean semiconductor environment, Ozone reacts with a wide range of precursor gases resulting in the creation of Al2O3, ZrO2, HfO2, and La2O3 metal oxides to enable thin film deposition processes like Atomic Layer Deposition (ALD) and Etch (ALE). MKS’ generator uses Grade 6 gas, enabling the creation of higher film density improving product yield. Photovoltaic and Display manufacturing leverage semiconductor best practices and utilize ozone to create enhanced thin film barriers, improving product performance and reliability.
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Process Ozone Sensor
Model 452
Teledyne Advanced Pollution Instrumentation
The Model 452 is a microprocessor based gas sensor for measuring high concentrations of ozone in oxygen or air with accuracy and dependability. The measurement principle is based on the absorption of UV light at 254nm. Readings are available in % by weight, or grams/Normal cubic meter. Temperature and pressure compensation up to 3 Bar Absolute is a standard feature.
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Laboratory Ozone Test Chamber
CX-150
Shenzhen Chuangxin Instruments Co., Ltd.
Laboratory Ozone Test chamber is widely used to control products quality in measuring quality control; Rubber & Plastics; automobile production; wire and cable; packing materials; instruments and meters; medical equipment; civilian nuclear energy; civil aviation; colleges and universities; research laboratories; inspection arbitration, and technical supervision departments and other rubber products.
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Compact Ozone Monitor
Model 430
Teledyne Advanced Pollution Instrumentation
Teledyne API, a recognized leader in Ozone measurements, is pleased to offer the Model 430 O3 Monitor. The 430 is a compact instrument that uses the proven UV-absorption principle. The small footprint and robust design make it ideal for a variety of applications where portability and accuracy are both necessary.
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Waterproof Ozone Tester
ORPTestr 10
Large Display Screen - dual display LCD for enhanced readability, provides comprehensive meter information
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Dissolved Gas Systems
Dissolved gas in deionized water has been widely adopted in manufacturing processes in Electronics, Semiconductors, Flat Panel Displays and Solar applications. These wet techniques increase manufacturing productivity in particle lift-off and wet clean operations. Dissolved gases such as Ammonia, Carbon Dioxide and Ozone are environmentally friendly alternatives to heavy chemicals like sulfuric acid and peroxide acid solutions. MKS offers a large product line of Dissolved Gas systems that improve wet cleaning operations.
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Dissolved Ozone Monitor
HZ-960
High precision, wide-range dissolved ozone monitor. The repeatability: F.S. +/- 0.2%. Can select the 4 types of measurement range in-line detectors.
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Ultra Clean, High Concentration, High Flow Ozone Generator
SEMOZON® AX8415
The SEMOZON® AX8415 is the most innovative and versatile ozone generator developed by MKS. Ultra clean, high concentration, high flow ozone is produced by this generator's novel architecture and patented cell design, converting oxygen to >400 g/Nm3 of high concentration ozone for leading-edge applications in the semiconductor, flat panel display and photovoltaic industries.
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Automatic Ozone Test Chamber
EKT-2001OZ
Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (O3) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Portable Trace-Level O3 Calibrator
Model T753U
Teledyne Advanced Pollution Instrumentation
The Model T753U is a portable, microprocessor based precision Calibrator for Ozone gas instruments and sensors. Using a sophisticated Ozone generation system, combined with a sensitive photometer and pneumatic design, the T753U produces stable and reliable concentrations of Ozone in a convenient and rugged package based on our popular T750U Portable Multigas Calibrator platform. The T753U is housed in a high-density, molded travel case which includes an integral handle and wheels for durability and ease of use in the field for virtually any application. An internal zero air option extends the T753U's capabilities to also provide a clean and dry source of zero air, eliminating the need for a separate source of zero air. The internal zero air source module contains a software driven electronic inlet valve manifold allowing the calibrator to automatically switch between internal and external zero air sources depending on the application needs.
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Broadband Xe Light Source
PowerArc
75W Xe Ozone free light source for UV-Visible-NIR applicationsThe PowerArc™ is a complete, integrated light source that includes power supply, starter, high efficiency collection optics and lamp housing in one compact package.
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Ozone Climatic Test Chamber
The Ozone Test Chamber provide an effective solution to the testing of products for resistance against ozone degradation in a controlled environment. These test chambers function as static tensile test chambers as well as Rubber Test Chamber and are often used for studying static tensile deformation of various manufactured goods in the presence of ozone. The equipment works by exposing the test samples to uniform concentrations of ozone at constant temperatures and relative humidity in a sealed air environment. Under these conditions, the products undergo the process of corrosion which can be observed in the form of surface cracks and changes in other properties.
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Ozone Concentration Tester
OCT-3 PRO
Do you want to know if you can safely share a room with clients that has just been ozonated? Or maybe you want to compare the efficiency of ozonators? The OCT-3 PRO tester is the solution for you.
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Stand-alone Ozone Delivery System For Advanced Processes
SEMOZON® AX8585
SEMOZON® AX8585 stand-alone ozone gas delivery system is designed around the AX8410 PRIME ozone generator to provide high flow, high concentration, ultra clean ozone generation and delivery. This fully configurable product line is designed to meet the ever changing needs of the semiconductor industry. Each SEMOZON AX8585 is a fully integrated, high output ozone gas delivery system intended for use in an increasing number of semiconductor process applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth.
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Ozone Test Chamber
EKT-2001OZ-HCSLT
Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Ozone Aging Test Chambers
Dongguan Amade Instruments Technology Co., Ltd
Ozone aging test chamber is also called as ozone climate simulator or ozone aging tester. It is one of climatic testing instruments, which is to simulate and intensify the ozone condition for determining the cracking resistance of vulcanized or thermoplastic rubbers when subjected to dynamic or static tensile strain exposed at a man-made constant temperature to atmosphere containing given concentration of ozone in conformance with relevant specification. Ozone test is an indispensable method for people to research effects and mechanisms of ozone on rubbers, quick identify and evaluate anti-aging performance of rubbers and find solutions for improvement of quality and lifespan.
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Fully Integrated Modular Ozone Delivery System
SEMOZON® AX8580
The SEMOZON® AX8580 Ozone Delivery System generates and delivers high flow, high concentration, ultra-clean ozone for advanced thin film applications. The SEMOZON AX8580 is specifically designed for use with an increasing number of semiconductor process applications such as ALD, CVD and TEOS/Ozone CVD.
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Ozone Test Chamber
EKT-2001OZ-HCSSX
Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Ozone Test Chamber
EKT-2001OZ-HPSSX
Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Ozone Gas Generators
SEMOZON® Ozone gas generators and subsystems are the industry standard for compact, high concentration, ultra-clean ozone gas generation. Applications include Atomic Layer Deposition (ALD), Atomic Layer Etch (ALE), Chemical Vapor Deposition (CVD) and Wet Cleaning.
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Process Ozone Instruments
Teledyne Advanced Pollution Instrumentation
All of our instruments are designed meet the rigorous demands of ambient air quality, stack, or industrial process gas monitoring. Below is a list of a range of Teledyne API process ozone instruments.
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Photometric Ozone Calibrator
Model T703
Teledyne Advanced Pollution Instrumentation
The Model T703 is a microprocessor controlled ozone calibrator for precision gas analyzers. The Model T703 can deliver concentrations from 50 ppb to 5 ppm at flows from 1 LPM to 5 LPM.The Model T703 has two major components; the ozone generating device and the photometer. The ozone generator produces ozone by passing zero air over a UV lamp. Flow rate and lamp intensity are adjusted to deliver a specified ozone concentration by volume. The temperate and pressure compensated photometer, identical to that of the Model T400 ozone analyzer, provides feedback control of the UV lamp intensity, assuring stable ozone output. A nearly unlimited number of calibration sequences may be programmed into the non-volatile memory of the T703, covering time periods up to a year.
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Process Ozone Monitor
Model 454
Teledyne Advanced Pollution Instrumentation
The Model 454 is a microprocessor based gas monitor for measuring mid to high concentrations of ozone in oxygen or air.Available in a standard DIN panel mount configuration with a 4-digit LED display, the compact design provides ease of mounting and installation.
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Ozone Test
Ozone is an extremely reactive form of oxygen occurring around electrical discharges. It is also present in the atmosphere, but in small quantities. Ozone testing is performed to determine the effect on materials such as rubber, plastics, etc, which are susceptible to ozone-induced degradation.
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Process Ozone Monitor
Model 465M
Teledyne Advanced Pollution Instrumentation
The Model 465M is a microprocessor based medium range ozone monitor for measuring process ozone concentrations in water treatment, food processing, and research applications. The design has been specifically optimized for applications requiring the measurement of ozone at near-ambient pressure such as water treatment contactor off-gas measurement. The Model 465M has been designed to give accurate and stable readings over long time periods with little or no maintenance or calibration. The Model 465M is available in a NEMA 4X wall mount enclosure.
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Ozone 2 Click
64209
Ozone 2 click is an ozone detection (O3) sensor, based on the MQ131 gas sensor.
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High-concentration, High Flow Ozone Generator
SEMOZON® AX8407
The SEMOZON AX8407 generator converts pure oxygen into ozone through silent electrical discharge and achieves high output and high concentration level. It requires only minute levels of dopant nitrogen gas, far below the levels required for competitive ozone generators. As a result, the presence of contaminants, e.g. NOx compounds, is extremely low.
