Ozone
Trioxygen
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Product
Dissolved Gas Systems
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Dissolved gas in deionized water has been widely adopted in manufacturing processes in Electronics, Semiconductors, Flat Panel Displays and Solar applications. These wet techniques increase manufacturing productivity in particle lift-off and wet clean operations. Dissolved gases such as Ammonia, Carbon Dioxide and Ozone are environmentally friendly alternatives to heavy chemicals like sulfuric acid and peroxide acid solutions. MKS offers a large product line of Dissolved Gas systems that improve wet cleaning operations.
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Product
Chemiluminescence 03 Analyzer
Model T265
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Teledyne Advanced Pollution Instrumentation
The Model T265 is the only commercially available US EPA Federal Reference Method for Ambient Ozone Monitoring according to the latest US EPA regulatory rules for O3. The instrument uses Chemilumescence with Nitric Oxide (NO) as a reagent, making is safe, stable, and effective for all applications. The NO-CL method for Ozone has several advantages over the conventional UV absorption technology, including the avoidance of positive and commonly found interferrents such as VOCs, fine particulates, Mercury, turpines, ClO2, and others. If these pollutants are present in the atmosphere, it can cause UV absorption analyzers to give an artificially high Ozone measurement. The innovative T265 combines speed of response, sensitivity and stability of our proven nitrogen oxide analyzer, with a simple user interface, to provide reliable ozone measurements under the harshest conditions.
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Product
Process Ozone Monitor
Model 465M
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Teledyne Advanced Pollution Instrumentation
The Model 465M is a microprocessor based medium range ozone monitor for measuring process ozone concentrations in water treatment, food processing, and research applications. The design has been specifically optimized for applications requiring the measurement of ozone at near-ambient pressure such as water treatment contactor off-gas measurement. The Model 465M has been designed to give accurate and stable readings over long time periods with little or no maintenance or calibration. The Model 465M is available in a NEMA 4X wall mount enclosure.
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Product
Waterproof Ozone Tester
ORPTestr 10
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Large Display Screen - dual display LCD for enhanced readability, provides comprehensive meter information
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Product
Photometric Ozone Calibrator
Model T703
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Teledyne Advanced Pollution Instrumentation
The Model T703 is a microprocessor controlled ozone calibrator for precision gas analyzers. The Model T703 can deliver concentrations from 50 ppb to 5 ppm at flows from 1 LPM to 5 LPM.The Model T703 has two major components; the ozone generating device and the photometer. The ozone generator produces ozone by passing zero air over a UV lamp. Flow rate and lamp intensity are adjusted to deliver a specified ozone concentration by volume. The temperate and pressure compensated photometer, identical to that of the Model T400 ozone analyzer, provides feedback control of the UV lamp intensity, assuring stable ozone output. A nearly unlimited number of calibration sequences may be programmed into the non-volatile memory of the T703, covering time periods up to a year.
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Product
Trace-Level Photometric Ozone Calibrator
Model T703U
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Teledyne Advanced Pollution Instrumentation
The Model T703U is a microprocessor controlled ozone calibrator for precision gas analyzers. Expanded ozone audit levels have created a need for precise ozone calibration well below the capabilities of standard calibrators. The Model T703U is designed to meet the requirements of ultra-low ozone production.In addition to a high range with similar performance to the Model T703, the Model T703U has the capability to generate ozone in a low range, or "fractional" mode, for producing ozone levels down to 3 ppb, with exceptional accuracy. Flow rate and lamp intensity are adjusted to deliver a specified ozone concentration by volume. The temperature and pressure compensated photometer, identical to that of the Model T400 ozone analyzer, provides feedback control of the UV lamp intensity, assuring stable ozone output. A nearly unlimited number of calibration sequences may be programmed into the non-volatile memory of the T703U, covering time periods up to a year.
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Product
Ozone Gas Generators
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SEMOZON® Ozone gas generators and subsystems are the industry standard for compact, high concentration, ultra-clean ozone gas generation. Applications include Atomic Layer Deposition (ALD), Atomic Layer Etch (ALE), Chemical Vapor Deposition (CVD) and Wet Cleaning.
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Product
Stand-alone Ozone Delivery System For Advanced Processes
SEMOZON® AX8585
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SEMOZON® AX8585 stand-alone ozone gas delivery system is designed around the AX8410 PRIME ozone generator to provide high flow, high concentration, ultra clean ozone generation and delivery. This fully configurable product line is designed to meet the ever changing needs of the semiconductor industry. Each SEMOZON AX8585 is a fully integrated, high output ozone gas delivery system intended for use in an increasing number of semiconductor process applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth.
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Product
Ozone Analyzer
AQMS-300
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Concentration in ppb level by utilizing UV photometric absorption technology.
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Product
Ozone 2 Click
64209
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Ozone 2 click is an ozone detection (O3) sensor, based on the MQ131 gas sensor.
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Product
Chemiluminescence Method Ozone Analyzer
AQMS-350
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The AQMS-350 is used to detect and evaluate the O3 concentration level of one of the environmental air quality parameters (SO2, NO2, CO, O3, PM2.5, and PM10) based on chemiluminescence technology. This analyzer can measure the concentration of O3 in ppb~ppm level, with strong anti-interference capability, high repeatability, and accuracy.
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Product
Compact Ozone Monitor
Model 430
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Teledyne Advanced Pollution Instrumentation
Teledyne API, a recognized leader in Ozone measurements, is pleased to offer the Model 430 O3 Monitor. The 430 is a compact instrument that uses the proven UV-absorption principle. The small footprint and robust design make it ideal for a variety of applications where portability and accuracy are both necessary.
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Product
Ozone Gas Delivery Systems
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MKS ozone gas delivery systems provide field-proven, high concentration, ultra-clean ozone generation for advanced thin film applications such as Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), Tetraethyl Orthosilicate (TEOS)/Ozone CVD (HDSACVD), contaminant removal and oxide growth. Gas delivery models have integrated ozone concentration monitoring, flow control, and power distribution. Additional system options include safety monitoring, status indicators and ozone destruction capability.
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Product
Ozone Test Chambers
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Labodam Ozone Test Chambers are designed to detect the concentration of ozone while requiring low maintenance, having well-built corrosion resistant bodies, and while utilizing noiseless generators.
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Product
Portable Trace-Level O3 Calibrator
Model T753U
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Teledyne Advanced Pollution Instrumentation
The Model T753U is a portable, microprocessor based precision Calibrator for Ozone gas instruments and sensors. Using a sophisticated Ozone generation system, combined with a sensitive photometer and pneumatic design, the T753U produces stable and reliable concentrations of Ozone in a convenient and rugged package based on our popular T750U Portable Multigas Calibrator platform. The T753U is housed in a high-density, molded travel case which includes an integral handle and wheels for durability and ease of use in the field for virtually any application. An internal zero air option extends the T753U's capabilities to also provide a clean and dry source of zero air, eliminating the need for a separate source of zero air. The internal zero air source module contains a software driven electronic inlet valve manifold allowing the calibrator to automatically switch between internal and external zero air sources depending on the application needs.
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Product
PRIME Ultra Clean, Ultra High Concentration, Ultra High Flow Ozone Generator
SEMOZON® AX8410
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The SEMOZON® AX8410 PRIME is the initial product offering in MKS' next generation platform of compact, high concentration, high flow, ultra clean ozone generators. It features a newly designed cell and power structure to achieve twice the ozone output of earlier models with a similar footprint.
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Product
Gas Measuring Instruments
N Series
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Teledyne Advanced Pollution Instrumentation
N Series Gas Measuring Units for SO2 (Sulfur Dioxide), NO, NO2, NOX (Nitrogen Oxide, Nitrogen Dioxide), CO (Carbon Monoxide), CO2 (Carbon Dioxide), O3 (Ozone), True, Direct NO2, NOX, NO, CH4 (Methane), THC (Total Hydrocarbons), and more
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Product
Ozone Generators & Systems
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MKS offers a wide range of ozone generators and modular delivery systems which produce ultra-pure, reliable ozone gas. In the clean semiconductor environment, Ozone reacts with a wide range of precursor gases resulting in the creation of Al2O3, ZrO2, HfO2, and La2O3 metal oxides to enable thin film deposition processes like Atomic Layer Deposition (ALD) and Etch (ALE). MKS’ generator uses Grade 6 gas, enabling the creation of higher film density improving product yield. Photovoltaic and Display manufacturing leverage semiconductor best practices and utilize ozone to create enhanced thin film barriers, improving product performance and reliability.
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Product
Ozonator Controller
SCI-552
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Teledyne Advanced Pollution Instrumentation
The SCI-552 is a system controller for ozone delivery systems that provides electronic control interfaces for a number of typical system components, including: ozone generators, EV valves, mass flow controllers, back-pressure controllers, Teledyne API 452 ozone sensors, Teledyne API 470 dissolved ozone sensors, and a water chiller.
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Product
Ionizers / Active Oxygen Module (Ozonizers)
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Ionizer and ozonizer modules utilize high voltages to ionize/ozonize air molecules. They enable air purification, bacteria removal, deodorization, static charge elimination, electrostatic charging and more, and are widely used in air conditioners, air purifiers, refrigerators, washing machines and other products.
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Product
Broadband Xe Light Source
PowerArc
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75W Xe Ozone free light source for UV-Visible-NIR applicationsThe PowerArc™ is a complete, integrated light source that includes power supply, starter, high efficiency collection optics and lamp housing in one compact package.
