Quadrupole Mass Spectrometers and Residual Gas Analyzers
Extrel offers a wide range of flange mounted Quadrupole Mass Spectrometers (QMSs) and Residual Gas Analyzers (RGAs) that can fit any application or budget. Our products include our high performance, research grade MAX Systems, the high performance general use MAX-LT™ Systems and our standard RGA Systems. All of these systems include an Ionizer, Quadrupole Mass Filter, Detector, Mounting Flange, Power Supplies, Control Electronics and Software. They can be used as the core of a new mass spectrometer system, or as a way to add mass spectrometry to an existing system or as a diagnostic tool.
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Product
Flange Mounted System
MAX-QMS
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The Extrel MAX Systems are UHV-compatible flange mounted quadrupole mass spectrometers. The ionizer, quadrupole mass filter, and detector on a mounting flange are designed for inclusion in your exprimental vacuum chamber. The electronics consist of the rack mountable QCi (Quadrupole Control, integrated) quadrupole mass filter power supply and a Merlin CS (Command System). The Merlin mass spectrometer controller software completes the system.
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Product
Flange Mounted RGA MS
MAX-LT
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Extrel’s MAX-LT Flange Mounted Mass Spectrometers provide research grade performance at an affordable price. They are offered in 100, 200, 500 and 1,000 amu versions with a number of options available. Typical applications for the MAX-LT systems include, Thermal Programmed Desorption (TPD) analysis, Plasma and Chemical Vapor Deposition (CVD) Analysis and UHV Residual Gas Analysis.
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Product
MS/MS Systems
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For experiments that require more structural component information than a simple fragmentation pattern, Extrel offers MS/MS Systems. These systems are also ideal for applications that require in-depth identification and separation of isomers.
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Product
Extrel RGA
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The Extrel RGA is a reliable, easy-to-use residual gas analyzer that includes full range pressure measurement. It is the best performing RGA at an affordable price, which makes the system an ideal choice for background gas analysis, leak detection and vacuum chamber characterization.



