HORIBA, Ltd.
The HORIBA Group of worldwide companies provides an extensive array of instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing and metrology, to a broad range of scientific R&D and QC measurements.
- +81 75 313 8123
- +81 75 321 0752
- info@horiba.co.jp
- 2, Miyanohigashi,
Kisshoin
Minami-Ku, Kyoto 601-8510
Japan
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Product
Flat Carbon Sensor Conductivity meter
HE-960LF / FS-09F-1/2
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It is effective to keep the dilution of Slurry constant. Maintaining an appropriate conductivity value contributes to process stability in the wafer polishing process. Even highly viscous sample liquids such as CMP Slurry can be measured without problems because they use a sensor structure that reduces the risk of the sample liquid sticking to the electrodes. In addition, the sensor is made of a wetted material with excellent chemical resistance, which meets the cleanliness requirements of semiconductor processes. In addition to the above, it can also be used for introduction at the semiconductor process development stage and conductivity control of special chemicals.
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Product
FTIR Exhaust Gas Analyzer Direct Measurement Type
FTX-ONE-CS/RS
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The FTX-ONE offers a 5Hz sampling rate and simultaneously measure the concentrations of multiple components including NH3, CH4, and CO2, from (engine) direct exhaust gas using the Fourier Transform Infrared (FTIR) method in combination with multivariate analysis algorithm.
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Product
Wind Tunnel Balances
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To meet the increasing demands of a modern wind tunnel and the need for appropriate simulation, HORIBA has developed the rolling road and wheel spinning units for road simulation. To increase the wind tunnel efficiency, the HORIBA wind tunnel balances can be equipped with lifting platforms which enable vehicle modifications to be performed in a short time
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Product
High Speed & Precision Pressure Insensitive Mass Flow Module
D700MG
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Critical semiconductor manufacturing processes continuously desire precision gas flow control devices that enable both future innovation, and lab to fab transition of leading edge memory and logic device. HORIBA's propose the new pressure based MFC D700MG, the upper compatible model of the D500MG to support customer’s challenges.
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Product
Hyperspectral Camera and Imaging Systems (HSI)
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HORIBA designs and manufactures a large range of custom OEM Hyperspectral Imaging (HSI) systems that fit to your application.UV to SWIR, from very compact and lightweight design to wide field and high resolution systems.Standard platforms or custom designs including optics. HORIBA HSI can be fully integrated into at-line, on-line or in-line processes.
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Product
Dual Pitot Tube Flow Meter
PTFM-ONE-DT
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The Dual Pitot Tube Flow Meter, PTFM-ONE DT is a standalone interface for measuring exhaust gas flow rate of combustion engines. The system uses the tried-and-tested pitot tube principle with high-frequency transducers, with a sampling rate of 1kHz to accurately measure highly pulsating exhaust flows. This rapid capture rate ensures that any pulsations or exotic behaviour caused by the engine is measured, and the unique design of the PTFM-ONE DT means reverse flows can be calculated, with the same guarantee of sensitivity.
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Product
Miniature Multi Communication UV-NIR Spectrometer
VS70-MC
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VS70-MC (Multi Communication) is a high performance compact fiber coupled spectrometer system covering wide spectral range of 200 to 910 nm.This OEM optical module is built around HORIBA’s type-IV Aberration-Corrected Flat-Field Holographic Ion-Etched concave grating and is specially designed to easily adapt to a large variety of detectors and electronic drivers. This system is fitted with an integrated order-sorting filter to eliminate higher orders.
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Product
Ultra-compact Scientific CMOS Camera
Sylent™
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The HORIBA Sylent scientific CMOS (sCMOS) uncooled camera line provides end-users with three novel high QE backilluminated sensor models that provide diversified solutions to successfully meet the most demanding photonic applications for the scientific and industrial sectors.
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Product
Hyperspectral Imaging Spectrometer
Hyperspectral PoliSpectra® H116
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HORIBA has developed a unique hyperspectral imaging spectrometer with an integrated scientific CMOS camera (12-16 bit) featuring HDR (95dB Dynamic Range and 1.7e- noise) and 95% Q.E peak efficiency:PoliSpectra® H116 features broad UV-NIR coverage in one acquisition (185-1050 nm) combined with the highest spectral resolution (<1 nm).
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Product
Pitot Tube Flow Meter
PTFM-1000V2
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The Pitot Tube Flow Meter, PTFM-1000V2 is a standalone interface for measuring exhaust gas flow rate of combustion engines. The system uses the tried-and-tested pitot tube principle with high-frequency transducers to accurately measure highly pulsating exhaust flows with a sampling rate of 1kHz. This rapid capture rate ensures that any pulsations or exotic behaviour in an engine is measured, and the unique design of the PTFM pitot tube means reverse flows can be measured with the same guarantee of sensitivity. The interface can be run standalone with a laptop, or seamlessly integrated to run alongside an analyser system without adding any more steps to the test cycle process.
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Product
Mixed Injection System Liquid Vaporizers
MI-1000/MV-1000
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This mixed injection system can rapidly vaporize a wide variety of liquid sources by using the gas-liquid mixture vaporization method. This method allows for the stable vaporization of high boiling point liquids.
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Product
Cathodoluminescence Solutions for Electron Microscopy
CLUE Series
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HORIBA Scientific's Cathodoluminescence Universal Extension enhances any SEM’s analytical capabilities while maintaining its original functionality. Since the sample is able to remain in the same spot, CLUE can easily be combined with other microscopy applications, such as EDS and EBIC.
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Product
Deep Cooled Vacuum Ultra Violet Scientific Cameras
Syncerity VUV
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High energy camera detection that can interface with a vacuum chamber for measurement down to 120 nm
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Product
Miniature Spectrometers
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Ultra compact fiber-coupled instruments for portable applications in the 180 - 1700 nm range.
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Product
Gratings for Astronomy
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HORIBA Scientific proposes large size Transmission Holographic Fused Silica Etched (FSE) gratings or Ruled blazed reflection gratings for Astronomy.Both technologies offer a very high efficiency, low polarization dependence and low angular sensitivity.
