HORIBA, Ltd.
The HORIBA Group of worldwide companies provides an extensive array of instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing and metrology, to a broad range of scientific R&D and QC measurements.
- +81 75 313 8123
- +81 75 321 0752
- info@horiba.co.jp
- 2, Miyanohigashi,
Kisshoin
Minami-Ku, Kyoto 601-8510
Japan
Categories
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product
In-Situ Spectroscopic Ellipsometer for Real-Time Thin Film Monitoring
UVISEL Plus In-Situ
The UVISEL Plus in-situ spectroscopic ellipsometer can be easily mounted on process chambers (PECVD, MOCVD, sputter, evaporation, ALD, MBE) for the real-time control of thin film deposition or etch processes.The UVISEL Plus in-situ provides the unique combinations of very high speed, sensitivity, dynamic range and accuracy making the instrument able to control deposition / etch at the atomic layer thickness level, even for rapid processes.
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Spectroscopic Ellipsometry
Spectroscopic ellipsometry is a surface-sensitive, non-destructive, non-intrusive optical technique widely used for thin layers and surface characterization. It is based simply on the change in the polarization state of light as it is reflected obliquely from a thin film sample. Depending on the type of material, spectroscopic ellipsometers can measure thickness from a few Å to tens of microns. It is also an excellent technique for multi-layers measurement.
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Wide Range Pressure Insensitive Mass Flow Module
D700WR
The D700WR installs a new restrictor designed specifically for a wide range control application with high accuracy performance based on the CRITERION™ technology. D700WR can control flow rate down to 0.1% of full scale range which helps users to optimize the flexibility of gas delivery system. For example, if the system installs multiple MFCs for high and low flow rate control, users can reduce the number of MFCs and use another MFC in the same position for a different purpose.
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Dual Pitot Tube Flow Meter
PTFM-ONE-DT
The Dual Pitot Tube Flow Meter, PTFM-ONE DT is a standalone interface for measuring exhaust gas flow rate of combustion engines. The system uses the tried-and-tested pitot tube principle with high-frequency transducers, with a sampling rate of 1kHz to accurately measure highly pulsating exhaust flows. This rapid capture rate ensures that any pulsations or exotic behaviour caused by the engine is measured, and the unique design of the PTFM-ONE DT means reverse flows can be calculated, with the same guarantee of sensitivity.
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Field-installation Type Electric Resistivity Meter (Four-Wire Transmission)
HE-200R
HE-200R connects resistivity sensor (ERF Series) and measures resistivity and temperature in the sample water. It is suitable for measurement of UPW resistivity.
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Benchtop Conductivity Meter
LAQUA EC2000
Water quality analysis is repeatedly performed in laboratories on a daily basis. Our compact and powerful benchtop model was developed to provide simplicity with excellent on-site usability.
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Raman Spectrometer - Confocal Raman Microscope
XploRA™ PLUS
Incorporating unique and powerful functions in a reliable, high performance system, ideally suited to the research and analytical lab, the XploRA PLUS is our best multi-sample, multi-user Raman microscope ever.It is fully confocal, not compromising image quality, spatial or depth resolution. The SWIFT Fast Raman images are the fastest fully confocal Raman images available, typically 10x faster than conventional Raman imaging.
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AFM-Raman for Physical and Chemical Imaging
XploRA Nano
Fully integrated system based on SmartSPM state of the art scanning probe microscope and XploRA Raman micro-spectrometer.Compact, fully automated and easy-to-use, the XploRA Nano concentrates the power of AFM-Raman into an affordable yet full-featured package, making TERS imaging a reality for all. The TERS proven system.
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Reticle/Mask Particle Remover
RP-1
The RP-1 automatically removes particles from the reticle/mask by air (or N2) and vacuum suction. Routinely removing the particles before the lithography process extends the replacement cycle of the pellicle and cleaning cycle of the mask, thereby contributing to a reduction in running costs.
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Benchtop pH/ORP/Ion/DO/BOD Meter
LAQUA PD2000
Water quality analysis is repeatedly performed in laboratories on a daily basis. Our compact and powerful benchtop model was developed to provide simplicity with excellent on-site usability.
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Water Distribution Monitor
TW-100
HORIBA’s TW-100 is a process water quality measurement system designed for drinking water and water distribution plants. The TW-100 monitors turbidity, color, free chlorine and pressure. This chemical free method reduces operating costs as it requires minimal maintenance and improves process control.
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X-ray Fluorescence Sulfur-in-Oil Analyzer
SLFA-20
The SLFA-20 are designed specifically to meet the recent demanding needs of measuring the new low sulfur fuels, diesel and RFG.Using the X-ray fluorescence technique, fast and accurate measurements can be carried out in compliance with the ASTM D4294 method, either in the lab or in the field.
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UV Plasma Sources
UVS300|UVS 10/35
The UVS300 and UVS 10/35 are UV Plasma sources with high intensity, working with different gases.
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HF / HCl Concentration Monitor
HF-960H
The HF-960H accurately measures concentrations of hydrofluoric and hydrochloric acid used in semiconductor manufacturing and other processes. The dedicated FES-510 series sensor is made from materials that are highly resistant to chemicals, making this unit ideal for the management of hydrofluoric and hydrochloric acid, even in high concentrations.
