CAPRES A/S
We offer a versatile Microscopic Four- and Twelve Point Probe (M4PP and M12PP) for accurate micro-scale electrical tests
- 45 88 82 14 70
- 45 88 82 14 99
- Diplomvej, Building
373 DK - 2800 Kgs.
Lyngby, Denmark
Denmark
Categories
-
product
Ultra-Shallow Junctions
microHALL-M300
The microHALL-M300 is a state of the art tool with regard to key process parameters such as high rate of throughput, reliable and reproducible measurements, simple and intuitive user interface, low cost of ownership and high machine uptime secured by easy and efficient productive maintenance procedures.
-
product
microHALL
A300
The microHALL-A300 is a state of the art tool with regard to key production and process parameters such as high rate of throughput, reliable and reproducible measurements, simple and intuitive user interface, low cost of ownership and high machine uptime secured by easy and efficient productive maintenance procedures.
-
product
microRSP
M300
The semi-automatic microRSP-M300 by CAPRES A/S is a unique R&D tool for sheet resistance measurements of conductive surfaces in micro scale. Like the automatic microRSP by CAPRES A/S the semi-automatic microRSP makes use of the micro 4 point probe characterised by having a probe pitch of 1000 times smaller pin spacing/pitch than that of conventional probes.
-
product
microRSP
M200
The window of acceptable sheet resistance is shrinking with each technology node resulting in increasingly more rigorous standards for scale and accuracy of metrology tools. The shortcomings of traditional types of 4 point probes are becoming more and more evident. By developing the microRSP-M200, a unique tool for measuring the sheet resistance of conducting films, hereunder ultra shallow junctions (USJ’s), CAPRES A/S has responded to the growing need for reliable sheet resistance measurements on micro scale.
-
product
Microscopic Probes
M12PP
CAPRES M12PP Microscopic Twelve-Point Probes are specialized versions of the CAPRES Micro Multi-Point Probes. By using a dedicated 12-by-4 multiplexer, a total of 495 different pin-configurations can be obtained, each with different probe pitch. This is utilized in e.g. the CIPTech, where 8 or more combinations are used to obtain a “depth profiling” of the measured structures.
-
product
Microscopic Four-Point Probes
M4PP
CAPRES M4PP Microscopic Four-Point Probes have an electrode pitch three orders of magnitude smaller than conventional four-point probes, and are fabricated using silicon micro-fabrication technology.
